Dr. Samar K. Saha
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 17 May 2005 Paper
Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.597698
KEYWORDS: Oxides, Field effect transistors, Doping, Silicon, Dielectrics, Germanium, Bismuth, Computer engineering

Proceedings Article | 17 May 2005 Paper
Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.601974
KEYWORDS: Instrument modeling, Data modeling, Transistors, Computer aided design, Solid modeling, Device simulation, Process modeling, System on a chip, Calibration, Measurement devices

Proceedings Article | 10 July 2003 Paper
Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.485267
KEYWORDS: Manufacturing, TCAD, Semiconducting wafers, Monte Carlo methods, Instrument modeling, Device simulation, Reverse modeling, Calibration, Process control, Computer simulations

Proceedings Article | 10 July 2003 Paper
Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.485268
KEYWORDS: Silicon, Field effect transistors, Device simulation, Oxides, Doping, Resistance, Electrodes, Instrument modeling, Semiconductors

Proceedings Article | 18 August 2000 Paper
Proceedings Volume 4181, (2000) https://doi.org/10.1117/12.395731
KEYWORDS: Optical alignment, Semiconducting wafers, Distortion, Overlay metrology, Silicon, Reticles, Mirrors, Oxides, Image processing, Field effect transistors

Showing 5 of 9 publications
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