Recently, there has been some interest in multi-junction vertical-cavity surface-emitting lasers (VCSELs) due to their scaling properties. In particular the power density and power conversion efficiency (PCE) can be significantly increased. A PCE in excess of 63% has been demonstrated for multi-junction VCSELs, as well as a peak output power of 1kW from chips as small as 1mm^2. Multi-junction VCSELs thus present many interesting opportunities and we will review our development efforts of this technology across the near-infrared wavelength range of 800-1100nm, and covering several applications including the industrial, automotive (LIDAR in particular), and consumer fields.
The demand for high-power vertical-cavity surface-emitting laser (VCSEL) arrays is increasing continuously due to the growing market for 3D sensing solutions. In these applications (e.g. face recognition or drive-assistance systems), the distances of the objects of interest vary by orders of magnitude. For this reason, a flexible tailoring of the beam divergence is desired. In this work, we discuss methods to tune the emitted beam profile by only optimizing the epitaxial structure of a VCSEL. We show results of VCSEL arrays with beam divergences ranging between ~10° and 45°. This technique is also power scalable and multi-watt VCSEL arrays can be realized.
High power 808nm semiconductor lasers are widely used for pumping neodymium-doped yttrium aluminum garnet (Nd:YAG) crystal to produce high-brightness lasing at 1064nm. In addition, there are growing interest to use such high power 808nm lasers in the field of automotive infra-red (IR) illumination and medical aesthetic treatment. Vertical-cavity surface-emitting lasers (VCSELs) have emerged as a promising candidate and attracted increased interests for those applications, due to their combined advantages of high efficiency, low diverging circular beam, narrow emission spectrum with reduced temperature sensitivity, low-cost manufacturability, simpler coupling optics, and increased reliability, especially at high temperatures. They can emit very high power with very high power density as they can be conveniently configured into large two-dimensional arrays and modules of arrays. We report recent development on such high-power, high-efficiency 808nm VCSELs with industrial leading ~55% power conversion efficiency (PCE). Top emitting VCSELs were grown by MOCVD and processed into single devices and 2D arrays using selective wet oxidation process and substrate removal technique for efficient current confinement and heat removal. Peak PCE of 51% and peak power of 800W were achieved from 5x5mm array, corresponding to peak power density of ~4kW/cm2. Pumped with new generation of 2.3kW VCSEL module, Q-switched laser pulse energy at 1064nm reached 46.9mJ, more than doubled from previously reported results.
A compact passively Q-switched Nd:YAG laser was end-pumped by a water-cooled 808 nm vertical-cavity surface-emitting laser (VCSEL) pump module comprising four high power, high brightness VCSEL chips with a combined 10 mm diameter circular emitting area and 2.3 kW total peak power, resulting in 47 mJ laser pulse energy at 1064 nm with 16% optical efficiency at 15 Hz repetition frequency. A laser package comprising an air-cooled 1.6 kW VCSEL pump module produced 37 mJ laser pulse energy, while more than 13 mJ laser pulse energy was demonstrated in a bench-top experiment with a very compact laser set-up using a single 5 mm x 5 mm VCSEL chip.
High power 808 nm vertical-cavity surface-emitting laser (VCSEL) arrays were used to end-pump diffusion-bonded composite laser rods consisting of an Nd:YAG gain medium and a Cr:YAG saturable absorber. The laser pulse energy, q-switch delay time, and optical efficiency of a passively Q-switched monolithic solid state laser in a compact rugged package were measured as a function of VCSEL power for various heatsink temperatures. Up to 19 mJ laser pulse energy was produced with 13% optical efficiency.
Vertical-cavity surface-emitting lasers (VCSELs) are attractive for many pumping and direct-diode applications due to combined advantages in low cost, high reliability, narrow and thermally stable spectrum, high power scalability, and easy system integration, etc. We report our progress on electrically pumped, GaAs-based, high- power high-brightness VCSELs and 2D arrays in the infrared wavelength range. At 976nm, over 5.5W peak CW output and 60% peak power conversion efficiency (PCE) were demonstrated with 225um oxide-confined device. For 5x5mm arrays, peak PCE of 54% and peak power of >450W at 976nm, peak PCE of 46% and peak power of >110W at 808nm were achieved respectively under QCW conditions. External cavity configuration was used to improve the VCSEL brightness. Single mode output of 280mW and 37% PCE were realized from 80um device. For large 325um device, we obtained single mode (M2=1.1) CW output of 2.1W, corresponding to a brightness of 160MW/cm2*sr. Three major areas of applications using such VCSELs are discussed: 1. High brightness fiber output; 2. High power, high efficiency green lasers from 2nd harmonic generation. 3.34W green output with 21.2% PCE were achieved; 3. Pumping solid state lasers for high energy pulse generation. We have demonstrated Q-switched pulses with 16.1mJ at 1064nm and 4.9mJ with 1W average power at 473nm.
We have achieved a 21.2% wall-plug efficiency green laser at 532 nm based on an electrically pumped vertical externalcavity surface emitting laser (VECSEL) through intracavity second harmonic generation. The continuous-wave green output power was 3.34 W. The VECSEL gain device is cooled by using a thermoelectric cooler, which can greatly benefit packaging. Both power and efficiency can be further scaled up by optimizing external-cavity design and improving the performance of VECSEL gain device.
We report on a Q-switched VCSEL side-pumped 946 nm Nd:YAG laser that produces high average power blue light with high pulse energy after frequency doubling in BBO. The gain medium was water cooled and symmetrically pumped by three 1 kW 808 nm VCSEL pump modules. More than 1 W blue output was achieved at 210 Hz with 4.9 mJ pulse energy and at 340 Hz with 3.2 mJ pulse energy, with 42% and 36% second harmonic conversion efficiency respectively. Higher pulse energy was obtained at lower repetition frequencies, up to 9.3 mJ at 70 Hz with 52% conversion efficiency.
High power, kW-class, 808 nm pump modules based on the vertical-cavity surface-emitting laser (VCSEL) technology were developed for side-pumping of solid-state lasers. Two 1.2 kW VCSEL pump modules were implemented in a dual side-pumped Q-switched Nd:YAG laser operating at 946 nm. The laser output was frequency doubled in a BBO crystal to produce pulsed blue light. With 125 μs pump pulses at a 300 Hz repetition rate 6.1 W QCW 946 nm laser power was produced. The laser power was limited by thermal lensing in the Nd:YAG rod.
A compact UV pulsed laser pumped by high-power two-dimensional arrays of vertical-cavity surface-emitting lasers
(VCSELs) was presented. A passively Q-switched 1064-nm Nd:YAG laser was side-pumped by kW-class 808-nm VCSEL pump modules and the output pulses were frequency quadrupled to 266-nm. 10-ns, 0.68-mJ UV pulsed output was obtained at 1.33k-Hz repetition rate. The average UV power is < 0.9-W. This VCSEL pumped high power UV laser source provides a reliable, low-cost and low-profile solution for military and commercial applications including remote
sensing, laser processing and spectroscopy.
Vertical-cavity surface-emitting lasers can be processed in large two-dimensional arrays of single devices to scale up the
power for solid-state laser pumping. These arrays emit in a circular, uniform beam, with a narrow and stable emission
spectrum that is well suited to the absorption spectra of solid-state gain media. kW-class 808 nm QCW VCSEL pump
modules were developed to pump compact Nd:YAG lasers. An end-pumped Nd:YAG laser was constructed that
produced 7.1 W average IR power, as well as a dual side-pumped passively Q-switched frequency-quadrupled Nd:YAG
laser that generated 0.8 mJ UV pulses at a 240 Hz repetition rate.
Solid-state lasers pumped by high-power two-dimensional arrays of vertical-cavity surface-emitting lasers (VCSELs)
were investigated. Both end-pumping and side-pumping schemes of Nd:YAG lasers with high power kW-class 808 nm
VCSEL pump modules were implemented. For one application 10 mJ blue laser pulses were obtained from a frequencydoubled
actively Q-switched VCSEL-array dual side-pumped Nd:YAG laser operating at 946 nm. For another
application 10 mJ green laser pulses were obtained from a frequency-doubled passively Q-switched VCSEL-array endpumped
Nd:YAG laser operating at 1064 nm. Both QCW and CW pumping schemes were investigated to achieve high
average Q-switched power.
Vertical-cavity surface-emitting lasers (VCSELs) have emerged as a promising candidate for pumping of solid-state
lasers, as they can be configured into high-power two-dimensional arrays and modules of arrays. VCSELs emit in a
circular, uniform beam which can greatly reduce the complexity and cost of coupling optics. Their narrow and stable
emission spectrum is well suited to the narrow absorption spectrum generally observed for solid-state gain media. The
superior reliability of VCSELs greatly enhances the robustness of solid-state laser systems and enables high-temperature
operation. In this work, we discuss recent developments on kW-class VCSEL pumps for solid-state lasers. Results on
VCSEL modules designed for end-pumping and for side-pumping are presented. More than 4kW in CW operation is
demonstrated from a multi-array VCSEL module. We also present results on solid-state lasers using VCSEL modules as
pumps. In an end-pumping configuration, more than 250W peak power at 1064nm is demonstrated, and in a sidepumping
Q-switched configuration, more than 21mJ at 946nm is demonstrated for an Nd:YAG solid-state laser.
High power 808 nm VCSEL arrays were developed to pump compact pulsed Nd:YAG lasers. A QCW side-pumped
passively Q-switched Nd:YAG laser operating at 1064 nm produced linearly polarized 4 ns IR pulses with 4.7 mJ pulse
energy. These pulses were externally frequency doubled and quadrupled resulting in 2.5 mJ pulse energy at 532 nm and
0.8 mJ at 266 nm respectively. A similar but actively Q-switched dual side-pumped Nd:YAG laser operating at the
weaker quasi three-level 946 nm transition produced 12 mJ pulses that were efficiently frequency doubled resulting in
5.6 mJ blue pulses of 17 ns duration.
Infrared illumination is used in the commercial and defense markets for surveillance and security, for high-speed
imaging, and for military covert operations. Vertical-cavity surface-emitting lasers (VCSELs) are an attractive candidate
for IR illumination applications as they offer advantageous properties such as efficiency, intrinsically low diverging
circular beam, low-cost manufacturing, narrow emission spectrum, and high reliability. VCSELs can also operate at
high temperatures, thereby meeting the harsh environmental requirements of many illuminators. The efficiency and
brightness of these VCSELs also reduce the requirements of the power supply compared to, for example, an LED
approach. We present results on VCSEL arrays for illumination applications, as well as results on VCSEL-based
illumination experiments. These VCSELs are used in illuminators emitting from a few Watts up to several hundred
Watts. The emission of these VCSEL-based illuminators is speckle-free with no interference patterns. Infra-red
illumination at up to 1,600ft (500m) from the source has been demonstrated using VCSEL-based illumination, without
any optics.
Many applications require laser pump sources with high output power (tens to hundreds of Watts) in the
smallest spot, with the smallest divergence. Such high-brightness pump sources typically use edge-emitting
semiconductor lasers. However, it is also possible to use high-power two-dimensional vertical-cavity surfaceemitting
laser (VCSEL) arrays for this purpose. Using a single 976nm 2D VCSEL array chip in an external
cavity configuration, combined with a matching micro-lens array, we have demonstrated more than 30W output
power from a 50μm/0.22NA fiber, corresponding to a brightness of 10MW/cm2.sr. This represents a substantial
reduction in module complexity compared to edge-emitter based modules with similar brightness. These novel
high-brightness pump sources exhibit some well-known intrinsic VCSEL performance features such as wavelength
stability and narrow spectrum. Power and brightness can be scaled up using polarization and spectral combining.
The properties of high-power and low-noise seed lasers are key for high performance master oscillator-power amplifier
(MOPA) fiber-lasers. We have successfully demonstrated high-power and low-noise seed lasers using our VCSEL
technology. We used an external-cavity configuration with optimum cavity design for single-mode control, and the
mode-beating problem can be fully avoided compared to the edge-emitter seed lasers. The external-cavity VCSEL
achieved high-power single-mode pulsed operation with good mode quality that allowed it to be efficiently coupled into
a single-mode PM or non-PM fiber. Using high-speed driving electronics, optical pulse widths of 12ns and shorter were
obtained with repetition rates of up to 1 MHz. The optical output peak power obtained is over 10 W.
We have also demonstrated a CW version of this high-power VCSEL seed laser achieving single transverse and
longitudinal mode with an output power of greater than 0.5 W. The high-power external cavity VCSELs were operated
in single longitudinal mode demonstrating narrow spectral line-width of 200kHz, and having very low RIN of -155
dBc/Hz at 1MHz, which was even lower at higher frequencies.
Electrically pumped vertical cavity surface emitting lasers (VCSELs) can produce hundreds of mW's of
976 nm CW output in a TEM00 mode when operated with an external cavity configuration. During pulsed
operation (<50ns) a significant increase in the peak power is observed, compared to CW operation. High
peak powers makes these lasers very well suited for intra-cavity frequency doubling with a non-linear
crystal. We are developing surface emitting lasers in 2D array format and high power pulsed blue laser
arrays in a small size. We present results of CW and pulsed operation of such lasers.
We are developing a low noise high power ultra-stable diode pumped Er-Yb co-doped phosphate glass
laser. Erbium doped phosphate glass permits high co-doping with ytterbium ions that strongly absorb at
976 nm and efficiently transfer their energy to the active erbium material. This drastically decreases the
absorption length at the 976 nm pump wavelength and thus the overall size of the laser. Aside from the
advantage for packaging a short cavity length results in a large longitudinal mode-spacing (>40 GHz),
which allows for single longitudinal mode operation in the 1530-1565 nm C-band for telecommunication
by inserting a tunable low-finesse etalon in the laser cavity. In addition, due to the energy transfer between
the co-dopant and the active material, the laser shows a strongly reduced sensitivity to fluctuations in pump
power. The strong peak in the RIN spectrum at the relaxation oscillation frequency (0.1-1 MHz) due to
cavity-loss perturbations can be drastically reduced with a non-linear absorbing material inside the laser
cavity. Using this approach for an optimized laser cavity design we have achieved -160 dB/Hz RIN at 1
MHz for 35 mW output. Above 100 MHz the RIN becomes shot noise limited (-168 dB/Hz @ 20mA
photocurrent). The laser has excellent long-term frequency stability when locked to our wavelength locker
(<250 kHz). Furthermore, the laser has been shown to have a narrow intrinsic linewidth (~10 Hz) that we
are working towards by means of intra-cavity phase modulation.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.