Dr. Robert S. Sposili Profile

Dr. Robert S. Sposili

Staff Applications Engineer at Spectra-Physics a division of MKS Instruments

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Publications (1)

Proceedings Article | 21 April 2017 Presentation + Paper

Laser processing of ceramics for microelectronics manufacturing

Robert Sposili, James Bovatsek, Rajesh Patel

Proceedings Volume 10091, 100910X (2017) https://doi.org/10.1117/12.2253159

KEYWORDS: Laser applications, Packaging, Laser ablation, Ceramics, Microelectronics, Laser processing, Manufacturing, Aluminum nitride, Pulsed laser operation, Laser cutting

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