Dr. Robert William Johnstone Profile

Dr. Robert William Johnstone

Ph.D. Student at Univ of Alberta

SPIE Involvement:

Author | Instructor

Proceedings Article | 7 February 2012 Paper

Bosch-like method for creating high aspect ratio poly(methyl methacrylate) (PMMA) structures

Marius Haiducu, Dan Sameoto, Ian Foulds, Robert Johnstone, Ash Parameswaran

Proceedings Volume 8248, 82480G (2012) https://doi.org/10.1117/12.908690

KEYWORDS: Polymethylmethacrylate, Etching, Lamps, Deep ultraviolet, Microfluidics, Light, Aluminum, Microfabrication, Optical lithography, Microelectromechanical systems

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SPIE Journal Paper | 1 October 2008

Isopropanol/water as a developer for poly(dimethylglutarimide)

Robert Johnstone, Ian Foulds, M. Pallapa, Ash Parameswaran

JM3, Vol. 7, Issue 04, 043006, (October 2008) https://doi.org/10.1117/12.10.1117/1.2990738

KEYWORDS: Etching, Semiconducting wafers, Deep ultraviolet, Gold, Absorption, Photoresist developing, Photoresist materials, Optical lithography, Polymers, Chromium

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SPIE Journal Paper | 1 April 2008

Exposure and development of thick polydimethylglutarimide films for MEMS applications using 254-nm irradiation

Ian Foulds, Robert Johnstone, See-Ho Tsang, M. Pallapa

JM3, Vol. 7, Issue 02, 023003, (April 2008) https://doi.org/10.1117/12.10.1117/1.2909468

KEYWORDS: Deep ultraviolet, Data modeling, Semiconducting wafers, Microelectromechanical systems, Absorbance, Absorption, Polymers, Etching, Standards development, Wafer-level optics

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Proceedings Article | 30 January 2006 Paper

MEMS mechanical logic units: characterization and improvements of devices fabricated with MicraGEM and PolyMUMPs

Sae-Won Lee, Robert Johnstone, Ash Parameswaran

Proceedings Volume 6037, 60371A (2006) https://doi.org/10.1117/12.638261

KEYWORDS: Logic, Electrodes, Microelectromechanical systems, Semiconductors, Resistance, Bridges, Relays, Logic devices, Transistors, Mechanical engineering

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SPIE Journal Paper | 1 October 2003

New design for surface micromachined bistable and multistable switches

Ian Foulds, Maria Trinh, Sam Hu, Steven Liao, Robert Johnstone, M. Parameswaran DUPLICATE RECORD - Do Not U

JM3, Vol. 2, Issue 04, (October 2003) https://doi.org/10.1117/12.10.1117/1.1610476

KEYWORDS: Switches, Microelectromechanical systems, Switching, Microfabrication, Relays, Mirrors, Reliability, Scanning electron microscopy, Microsystems, Optical switching

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SPIE Journal Paper | 1 January 2003

Determination of optical alignment in free-space micro-optical-bench systems using paraxial ray-transfer matrices

Robert Johnstone, M. Parameswaran

JM3, Vol. 2, Issue 01, (January 2003) https://doi.org/10.1117/12.10.1117/1.1531192

KEYWORDS: Matrices, Tolerancing, Optical alignment, Geometrical optics, Manufacturing, Optics manufacturing, Optical components, Ray tracing, Mirrors, Systems modeling

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Proceedings Article | 2 October 2001 Paper

Self-assembly of surface-micromachined structures using electrostatic attraction

Robert Johnstone, M. Parameswaran

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443076

KEYWORDS: Mirrors, Semiconducting wafers, Surface micromachining, Microfabrication, Prototyping, Numerical simulations, Glasses, 3D equipment, Micro optics, Sensors

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Showing 5 of 7 publications

Course Instructor

SC236: Polysilicon Surface Micromachine Technology and Devices

This course is designed to introduce newcomers to micromachining technology and concepts as well as those with a basic familiarity with integrated circuit manufacturing technology about the emerging field of Micro Electro Mechanical Systems (MEMS). Both manufacturing technologies for these devices and examples of sensor and actuator devices will be presented. The course focuses on polysilicon surface micromachining, but will also include a brief overview of other MEMS manufacturing technologies and devices.

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