In this paper, a resonant piezoelectric pump is driven by a new type of piezoelectric vibrator is presented. A square
piezoelectric vibrator with an arch cantilever beam structure is designed. Four arched cantilever beams are symmetrically
distributed at the output end. Through the arch structure design, the stiffness of the cantilever beam is reduced under a
certain size. The output displacement of the vibrator is improved and the output flow of the piezoelectric pump is improved.
In this paper, the square piezoelectric vibrator is modeled and simulated. The experimental results show that the
piezoelectric pump with square vibrator has good output performance. The flow rate reaches a peak of 49.8 ml/min at
505Hz when the driving voltage is 400 Vpp.
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