The Habitable Worlds Observatory (HWO) is the leading recommendation of the Astro2020 decadal survey. The HWO flagship, to be launched in the early 2040s, will directly survey 100 of the nearest stellar systems and their habitable zones with the goal of detecting and spectroscopically characterizing 25 potentially “Earth-like planets” (or “Exo-Earths”). Photonic-based technologies can substantially improve technical and science margins by improving coronagraphic efficiency for HWO. We present the architecture of a photonic-integrated circuit (PIC)-based coronagraph (“AstroPIC”), currently being studied as a near-infrared channel coronagraph that can be adopted as part of a suite of coronagraphs that could be deployed on the HWO. The PIC architecture miniaturizes a traditional coronagraph reducing the mass and volume of the coronagraph while providing an avenue to simply enhance the functionality, bandwidth coverage, and exoplanet yield of HWO by adopting a Mach-Zehnder Interferometric (MZI) mesh for photonic nulling. In this architecture we consider two cases: (1) a hybrid AstroPIC using a small number of modes (16-25) can still enhance exoplanet yields through complementary coronagraphic sensitivities to a traditional coronagraph, and (2) a full photonic chip AstroPIC that uses larger number of modes (400+) that can be operated as a stand-alone coronagraph that approaches the optimal coronagraph performance limit. We summarize recent experiments carried out at the Stanford photonic teststand which demonstrate key coronagraphic functionality including: (1) 1e-7 contrast (70 dB nulling) achieved with a simple PIC consisting of a 4-MZI mesh, (2) 8e-9 contrast (81 dB nulling) achieved with 6-MZI elements, and (3) a free-space coupling on chip of a beam demonstrating coronagraphic nulling and coronagraphic throughput of an off-axis source. We discuss the recent AstroPIC Cycle-1 tape-out which will enable additional coronagraphic demonstrations including deeper nulling and scaling to larger numbers of modes initiating a technology development process to mature PIC-based coronagraphy for inclusion into HWO.
Significance: Axially swept light sheet microscopy is used for deconvolution-free, high-resolution 3D imaging, but usually the axial scan mechanism reduces the top imaging speed. Phased arrays (PAs) for axial scanning enable both high resolution and high speed.
Aim: A high-speed PA with an update rate faster than the camera row read time is used to track the rolling shutter at camera-limited rates.
Approach: The point spread function is evaluated to ensure sub-micron isotropic resolution, and the technique is demonstrated on a live Drosophila embryo.
Results: Isotropic resolution is shown down to 720 ± 55 nm in all three spatial dimensions. With an update rate of 2.85 μs, the PA tracks the camera sensor rolling shutter at camera-limited rates. Features in the Drosophila embryo are resolved clearly compared with the equivalent static light sheet case. The random-access nature of the PA enables a camera sensor readout in the same direction for each frame to maintain even temporal sampling in image sequences with no speed loss.
Conclusions: Use of PAs is compatible with axially swept light sheet microscopy and offers significant improvements in speed.
We present the first demonstration of a waveguide-integrated dielectric laser accelerator. This structure and associated grating coupler are designed using a gradient-based inverse design approach. A waveguide is directly interfaced with an accelerator structure which is patterned with sub-wavelength features to produce near-fields phase-matched to electrons travelling through a 250 nm gap in the structure. We have experimentally demonstrated these waveguide-integrated accelerators by showing acceleration of subrelativistic electrons of initial energy 83.5 keV. We observe a maximum energy modulation of 1.19 keV over 30 μm. These results represent a significant step toward scalable and integrable on-chip dielectric laser accelerators for applications in ultrafast, medical, and high-energy technologies.
Particle accelerators are central to applications ranging from high-energy physics to medical treatments. However, the cost and size of conventional accelerators operating in radio-frequencies is prohibitive for widespread proliferation. Operating at optical and near-infrared frequencies, dielectric laser accelerators (DLAs) leverage the high damage threshold of dielectric materials, advances in nanofabrication techniques, and femtosecond pulsed lasers to produce miniaturized laser-driven accelerators. Previous demonstrations of dielectric laser acceleration have utilized free-space lasers directly incident on the accelerating structure. While this is acceptable for proof-of-principle, for DLAs to become a mature technology, it is necessary to integrate the accelerators on-chip to increase scalability and robustness of the system.
Here we demonstrate the first waveguide-integrated dielectric laser accelerator. In this scheme, a grating coupler is used to couple light from femtosecond pulsed laser to a 30 μm wide waveguide, fabricated on a silicon-on-insulator platform. The waveguide is then directly interfaced with an accelerating structure that is patterned with sub-wavelength features to produce near-fields phase-matched to electrons travelling through a vacuum-channel in the device. Both the input grating coupler and accelerator structure have been designed using the inverse design optimization approach.
We have experimentally demonstrated these waveguide-integrated accelerators by showing acceleration of subrelativistic electrons of initial energy 83.5 keV. We observe a maximum energy modulation of 1.19 keV over 30 μm. These results represent a significant step toward scalable and integrable on-chip DLAs for applications in ultrafast, medical, and high-energy technologies.
We demonstrate improved optical sectioning in light sheet fluorescence microscopy using tunable structured illumination (SI) frequencies to optimize image quality in scattering specimens. The SI patterns are generated coherently using a one-dimensional spatial light modulator for maximum pattern contrast, and the pattern spatial frequency is adjustable up to half the incoherent cutoff frequency of our detection objective. At this frequency, we demonstrate background reductions of 2 orders of magnitude.
Cardiomyocytes derived from human induced pluripotent stem cells (hiPSC-CMs) have promise for elucidating basic biological processes, drug testing, and regenerative medicine, yet are known to be heterogenous and immature. Methods to analyze cardiomyocytes are typically destructive or require labeling that alters the cells’ performance. Thus, we have developed a non-invasive image-based method for analyzing and classifying cardiomyocytes based on their morphology and contractile properties, and applied this method to analyze the effects of controlling cell shape.
We optimized a diffraction phase microscope (DPM) to yield low noise optical thickness measurements at over 100 frames per second. We extracted contraction and relaxation motion cycles of single hiPSC-CMs and analyzed beat frequency and regularity. DPM also enabled comparisons of morphological characteristics by measuring the optical thickness of the cells.
We compared populations of hiPSC-CMs with controlled (patterned) and uncontrolled (unpatterned) shape and we observed the following: 1) patterning effectively controls the shape of the cells, while cells with the desired mature-like shape rarely appear in the unpatterned population, 2) patterned cells are more likely to beat with consistent and lower beat frequency compared to unpatterned cells, and 3) the patterns tend to select for larger (more mature-like) cells. Finally, we identified a cutoff point under which cells of a certain dry mass do not adhere to the patterns. These results indicate that controlling the shape of hiPSC-CMs improves their characteristics, which can be analyzed using DPM, and has the potential to yield more consistent research results and homogenous populations of cells for clinical applications.
Beating heart cells, cardiomyocytes, are used in drug testing and have the potential for regenerative medicine. Currently their classification into atrial, nodal and ventricular subtypes is performed using destructive and tedious patch clamp measurements. We present a method for analyzing cardiomyocyte contraction cycles using diffraction phase microscopy, a fast quantitative phase imaging method based on off-axis common-path interferometry. The phase variation during the beating cycle can exceed 300 mrad in the most active regions, and is about 40 mrad on average. The phase noise is about 2 mrad per pixel, and it can be reduced by temporal averaging over multiple frames and spatial averaging over the cell. With a maximum acquisition rate exceeding 25,000 fps and with approximately 100 fps required for the characterization of cardiomyocyte motion, 250 frames can be averaged per step, reducing the temporally white noise by a factor of 16. Additional improvements can be obtained by averaging over multiple contraction cycles. Averaging over space does not reduce noise to the same extent due to low-pass spatial filtering during the phase extraction procedure. Low-pass filtering by the pinhole in the reference arm, resulting in high-pass filtering of the image, and low-pass filtering during the phase reconstruction highlight the dynamics of redistribution of dry mass within the cell during a beat cycle. Quantitative phase imaging is a promising approach for rapid, non-invasive, high-throughput characterization of human stem cell-derived cardiomyocytes in culture, with applications to modeling of diseases with patients' specific genes, drug development, and repair of damaged heart tissue.
We demonstrate two silicon photonic technologies for fabrication of monolithic photonic devices in standard silicon. Using these technologies, we demonstrate low-loss silicon waveguides (2.34 dB/cm), double-layer 3D waveguides, and waveguide Bragg reflectors in standard silicon for optical interconnects and sensing applications. These technologies simplify integration of electronics and photonics and are possible alternatives to SOI-based technology for implementation of silicon-photonic devices and systems for optical interconnects and sensing.
Near-infrared confocal microendoscopy is a promising technique for deep in vivo imaging of tissues and can generate high-resolution cross-sectional images at the micron-scale. We demonstrate the use of a dual-axis confocal (DAC) near-infrared fluorescence microendoscope with a 5.5-mm outer diameter for obtaining clinical images of human colorectal mucosa. High-speed two-dimensional en face scanning was achieved through a microelectromechanical systems (MEMS) scanner while a micromotor was used for adjusting the axial focus. In vivo images of human patients are collected at 5 frames/sec with a field of view of 362×212 μm2 and a maximum imaging depth of 140 μm. During routine endoscopy, indocyanine green (ICG) was topically applied a nonspecific optical contrasting agent to regions of the human colon. The DAC microendoscope was then used to obtain microanatomic images of the mucosa by detecting near-infrared fluorescence from ICG. These results suggest that DAC microendoscopy may have utility for visualizing the anatomical and, perhaps, functional changes associated with colorectal pathology for the early detection of colorectal cancer.
KEYWORDS: Skin, Microscopes, Green fluorescent protein, In vivo imaging, Confocal microscopy, 3D image processing, Visualization, Mouse models, Molecular imaging, Luminescence
A fluorescence confocal microscope incorporating a 1.8-mm-diam gradient-index relay lens is developed for in vivo histological guidance during resection of brain tumors. The microscope utilizes a dual-axis confocal architecture to efficiently reject out-of-focus light for high-contrast optical sectioning. A biaxial microelectromechanical system (MEMS) scanning mirror is actuated at resonance along each axis to achieve a large field of view with low-voltage waveforms. The unstable Lissajous scan, which results from actuating the orthogonal axes of the MEMS mirror at highly disparate resonance frequencies, is optimized to fully sample 500×500 pixels at two frames per second. Optically sectioned fluorescence images of brain tissues are obtained in living mice to demonstrate the utility of this microscope for image-guided resections.
We report a miniature mechanical gyroscope that utilizes optical means to detect rotation-induced displacements in a
mechanical structure. It utilizes the Foucault pendulum principle used in some existing MEMS gyroscopes: a rotating
reference frame induces a Coriolis force that oscillates the structure about an axis orthogonal to the driving-mode axis.
The main difference with similar MEMS gyroscopes is that this rotation-induced oscillation is sensed using a pair of
high-finesse fiber Fabry-Perot displacement sensors instead of a capacitive device. The drive axis is also driven by
radiation pressure inside a set of auxiliary fiber Fabry-Perot cavities, making this device immune to electromagnetic
interference. Calculations predict that a rotation sensitivity on the order of 1°/h/Hz1/2 is achievable. We show that this
structure solves several problems associated with MEMS gyroscopes utilizing electrostatic sensing methods.
We report a miniature fiber hydrophone that consists of a Fabry-Perot interferometer made of a photonic-crystal reflector
embedded on a compliant silicon diaphragm placed at the tip of a single-mode fiber. A model was developed to show
that after proper optimization to ocean acoustics, this sensor has a minimum detectable pressure that follows the
minimum ambient noise of the ocean (reaching a minimum of ~10 μPa/Hz1/2 at ~30 kHz) in the bandwidth of 1 Hz-100
kHz. By placing several such sensors with different acoustic power ranges within a single hydrophone head, the
hydrophone is able of exhibiting a dynamic range in the excess of 200 dB. A prototype was fabricated, assembled, and
tested that confirmed this high sensitivity and bandwidth.
Here we describe a simple optical design for a MEMS-based dual-axes fiber optic confocal scanning microscope that has
been miniaturized for handheld imaging of tissues, and which is capable of being further scaled to smaller dimensions
for endoscope compatibility while preserving its field-of-view (FOV), working distance, and resolution. Based on the
principle of parallel beams that are focused by a single parabolic mirror to a common point, the design allows the use of
replicated optical components mounted and aligned within a rugged cylindrical housing that is designed for use as a
handheld tissue microscope. A MEMS scanner is used for high speed scanning in the X-Y plane below the tissue
surface. An additional design feature is a mechanism for controlling a variable working distance, thus producing a scan
in the Z direction and allowing capture of 3-D volumetric images of tissue. The design parameters that affect the
resolution, FOV, and working distance are analyzed using ASAPTM optical modeling software and verified by
experimental results. Other features of this design include use of a solid immersion lens (SIL), which enhances both
resolution and FOV, and also provides index matching between the optics and the tissue.
A high-stroke micromirror array was designed, modeled, fabricated and tested. Each pixel in the 4×4 array consists of a
self-aligned vertical comb drive actuator that has had a single-crystal silicon mirror successfully bonded to it. Two
different bonding technologies were used, photoresist bonding and fusion bonding. The results of each of these bonding
methods will be presented. Analytical models combined with CoventorWareR simulations were used to design these
elements that would move up to 10 microns in piston motion with 200V applied. Devices were fabricated according to
this design and difference measurements performed with a white-light interferometer demonstrated a displacement of
0.18 microns with 200V applied. Further investigation revealed that fabrication process inaccuracy led to significantly
stiffer mechanical springs in the fabricated devices. The increased stiffness of the springs was shown to account for the
reduced displacement that was observed.
This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system
(MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is
also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner
is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by
self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum
layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a
maximum field of view (FOV) of 340 μm x 420 μm are achieved at 8 frames per second. The transverse resolution is
3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.
This paper presents an interferometric method with high sensitivity and good linearity for calibration of micromirror arrays used in maskless lithography. An analytic model based on electric-field perturbation is developed to quantify the influences of mirror configuration and defocus on calibration sensitivity. With the analytic model, two optimization strategies to achieve the highest sensitivity are developed. For a 5-by-5 sub-array with a pixel size of 0.5λ/NA, the sensitivity is improved from 0.0078 I/° when the surrounding pixels are not actuated, to 0.02286 I/° and 0.0347 I/° when the pixels are arranged in optimized schemes at defocus of 0.0RU and 1.5RU, respectively. The typical improvement is about 3X to 4X when the optimized calibration schemes are used.
A high-stroke micro-actuator array was designed, modeled, fabricated and tested. Each pixel in the 4x4 array consists of a self-aligned vertical comb drive actuator. This micro-actuator array was designed to become the foundation of a micro-mirror array that will be used as a deformable mirror for adaptive optics applications. Analytical models combined with CoventorWare(R) simulations were used to design actuators that would move up to 10 microns in piston motion with 100V applied. Devices were fabricated according to this design and testing of these devices demonstrated an actuator displacement of 1.4 microns with 200V applied. Further investigation revealed that fabrication process inaccuracy led to significantly stiffer mechanical springs in the fabricated devices. The increased stiffness of the springs was shown to account for the reduced displacement of the actuators relative to the design.
In this paper we present scanning micromirrors, actuated by self-aligned, bidirectional, vertical electrostatic combdrives, for dual-axes confocal microscopy. The fabrication process, which is based on Deep Reactive Ion Etching (DRIE) of Silicon-on-insulator (SOI) wafers with two silicon device layers, requires only three lithography steps for one-dimensional scanners, while an additional two lithography steps must be performed to create two-dimensional scanners. Only front side processing is required and the two oxide layers of the double SOI wafers provide efficient and reliable etch stops. These features combined with the fact that the combs are self aligned, enable high-speed, high-resolution microscanners with stable and reliable operation as required for endoscopic implementations of confocal microscopes.
Technologies for handling, sorting, and positioning of embryos are increasingly important in biomedicine. In this paper the status for ongoing projects aimed at developing instrumentation for high-throughput treatment of embryos is reviewed. Techniques for positioning of Drosophila (fruit-fly) embryos in 2-D arrays for use in microinjection experiments are especially focused. A method based on fluidic micro assembly is discussed, and important parameters such as immobilization yield, the number of misplaced embryos, and adhesion force of the embryos are reported. A model for the assembly process is described, and simulation results are in good agreement with adhesion force measurements. A fully automated MEMS based system for fruit-fly embryo injection has recently been demonstrated at Stanford University. The first experiments with double-stranded RNA injection proved successful, and the expected genetic modification of the embryos was observed.
Using both analytic theory, and first-principles finite-difference time-domain simulations, we introduce several novel mechanically tunable photonic crystal structures consisting of coupled photonic crystal slabs. These structures exploit guided resonance effects which give rise to strong variation of transmission for normally incident light. First, when the two slabs are separated apart by a few wavelengths, such a coupled slab structure behaves as a miniaturized Fabry-Perot cavity with two photonic crystal slabs acting as highly reflecting mirrors. Therefore, the transmission through the structure is highly sensitive to the spacing between the slabs. Second, when the two slabs are in proximity to each other, the evanescent tails of the resonance start to overlap. Exploiting the evanescent tunneling, we introduce a new type of optical all-pass filter. The filter exhibits near complete transmission for both on and off resonant frequencies, and yet generates large resonant group delay. Thus, we expect the coupled photonic crystal slab structures to play important roles in micro-mechanically tunable optical sensors and filters.
The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor & Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.
This paper describes two optical devices based on linear arrays of micro mirrors. The first is a phased array of micro mirrors that can be rotated as well as translated vertically to maintain coherence across the array. We demonstrate experimentally that such micro mirrors are capable of high-diffraction-efficiency, phased-array scanning of laser beams. The second device is a Gires- Tournois interferometer with a micro mirror array that provides tunable phase modulation for the multitude of partially reflected beams within the interferometer. We demonstrate experimentally that the MEMS-GT interferometer can operate as a tunable deinterleaver for dense Wavelength Division Multiplexed fiber optic communication.
The NSF Center for Adaptive Optics (CfAO) is coordinating a five to ten year program for the development of MEMS-based spatial light modulators suitable for adaptive optics applications. Participants in this multi-disciplinary program include several partner institutions and research collaborators. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications and would benefit from low device cost, small system size, and low power requirements. We present an overview of the CfAO MEMS development plan along with details of the current program status. Piston mirror array devices that satisfy minimum application requirements have been developed, and work is continuing to enhance the piston devices, add tip-tilt functionality, extend actuator stroke, create a large array addressing platform, and develop new coating processes.
We present design, analysis and characterization of surface- micromachined mirrors developed for fiber-optical cross-connects (OXCs). These mirrors are controlled by electrostatic microactuators, and are optimized for our beam-steering OXC switch architecture. Their geometry leads to high-density switch matrices, and the absence of frictional hinges in their actuation mechanism allows highly repeatable operation. This mirror structure features an adjustable maximum deflection angle that can be set during initial assembly or dynamically varied by integration with a standard surface-micromachined linear actuator. A commercial three-layer polysilicon surface- micromachining process is used for fabrication of the micromirrors.
We demonstrate a GaAs/AlGaAs multiple-quantum-well in-line fiber optic intensity modulator. Based on evanescent wave coupling between a GaAs/AlGaAs anti-resonant reflective optical waveguide and a side-polished single mode fiber, this device concept combines the inherent advantages of in- line fiber devices with high-performance GaAs integrated optoelectronics. The GaAs waveguide utilizes distributed Bragg reflector mirrors, which are designed to provide maximum reflection at a given more angle, to phase-match to the low-index fiber. Intensity modulation of the transmitted light through the fiber is achieved by changing the complex propagation constant of the GaAs waveguide through the quantum-confined Stark effect. Typical device shows an on/off ratio of 4:1, with an applied voltage of 9V. Calculations show that with a longer interaction region, an on/off ratio of more than 40dB is achievable with the same applied voltage.
A measurement system for static and dynamic characterization of silicon micromachines was developed. The computer- controlled system, using a HeNe-laser at 633 nm and a two- dimensional position sensor, allows simultaneous measurements of optical beam motion on two axes. To demonstrate the flexibility and functionality of the setup, measurements on various polysilicon surface-micromachined mirrors were performed. These measurements included tilt-angle versus driving-voltage curves, frequency responses, and motion perpendicular to the primary scan axis.
A GaAs/AlGaAs in-line fiber optic filter for wavelength division multiplexing applications is demonstrated. The device consists of a GaAs/AlGaAs anti-resonant reflecting optical waveguide (ARROW) evanescently coupled to a single mode fiber. At certain discrete wavelengths, light is coupled from the fiber to the ARROW, due to phasematching conditions. Sharp resonances are observed around the design wavelength of 830 nm. The 3 dB cutoff bandwidth for TE polarization is 0.5 nm and the rejection ratio is 9 dB.
We describe a raster-scanning display system comprised of two tilt-up micromachined polysilicon mirrors that rotate about orthogonal axes. We have demonstrated a resolution of 102 X 119 pixels. The optical efficiency of our two- mirror micro-optical raster-scanning system is comparable to that of micromachined display systems developed by Texas Instruments and Silicon Light Machines. Ease of integration with on-chip light sources and lenses has the potential to reduce packaging size, complexity and cost of the display system and makes it well suited for head-mounted display applications.
We present the design and fabrication of surface- micromachined electrostatic-comb driven microscanners that have high angular precision over a large scan angle. When used as resonant scanners, these mirrors have fast scan rates with very low operating power. We use polysilicon microhinges, which allow the micromirrors to be lifted out of the plane of the substrate after processing is completed, to create high-aspect-ratio optical surfaces with dimensions in the hundreds of micrometers s while taking advantage of the planar surface-micromachining processing technology. Microscanners that are capable of high-speed scanning over large scan angles with high precision have been fabricated. Application of these actuated micromirrors in laser barcode scanning and optical-fiber switches have been demonstrated. These single-mirror scanners can be combined to form more complicated microscanners such as a two-mirror, two-axis raster scanner that have a wide range of applications in areas such as medicine, displays, printing, data storage, and communications.
Two types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 micrometers ) ranges with submicron positioning.
We have designed and built integrated, movable micromirrors for on-chip alignment in silicon- optical-bench technology. The mirrors are fabricated using surface micromachining with three polysilicon layers. A polysilicon-hinge technology was used to achieve the required vertical dimensions and functionality for alignment in hybrid photonic integrated circuits. The positioning accuracy of the mirrors is measured to be on the order of 0.2 micrometers . This precision is shown theoretically and experimentally to be sufficient for laser-to-fiber coupling. In the experimental verification, we used external actuators to position the micromirror and obtained 45% coupling efficiency from a semiconductor laser (operating at 1.3 micrometers ) to a standard single-mode optical fiber. The stability and robustness of the micromirrors were demonstrated in shock and vibration tests that showed that the micromirrors will withstand normal handling and operation without the need for welding or gluing. This micromirror technology combines the low-cost advantage of passive alignment and the accuracy of active alignment. In addition to optoelectronic packaging, the micromirrors can be expected to find applications in grating-tuned external-cavity lasers, scanning lasers, and interferometers.
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