Mr. Minoru Kitada Profile

Minoru Kitada

at Dai Nippon Printing Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 9 November 2005 Paper

Image placement accuracy of single-membrane stencil masks for e-beam lithography

Minoru Kitada, Satoshi Yusa, Naoko Kuwahara, Hiroshi Fujita, Tadahiko Takikawa, Hisatake Sano, Morihisa Hoga

Proceedings Volume 5992, 59924R (2005) https://doi.org/10.1117/12.630114

KEYWORDS: Photomasks, Data corrections, Distortion, Silicon, Electron beam lithography, Metrology, Mask making, Data modeling, Semiconducting wafers, Printing

Read Abstract +

Proceedings Article | 28 June 2005 Paper

Experimental analysis of image placement accuracy of single-membrane masks for LEEPL

Minoru Kitada, Yuuki Aritsuka, Satoshi Yusa, Naoko Kuwahara, Hiroshi Fujita, Tadahiko Takikawa, Hisatake Sano, Morihisa Hoga

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617290

KEYWORDS: Photomasks, Distortion, Charged-particle lithography, Electron beam direct write lithography, Silicon, Image analysis, Lithography, Metrology, Semiconducting wafers, Error analysis

Read Abstract +

Proceedings Article | 20 August 2004 Paper

Development of a LEEPL mask: flatness and IP measurements

Yuuki Aritsuka, Minoru Kitada, Masaru Kurosawa, Tadahiko Takikawa, Hiroshi Fujita, Hisatake Sano, Morihisa Hoga, Naoya Hayashi

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557777

KEYWORDS: Photomasks, Semiconducting wafers, Charged-particle lithography, Silicon, Electron beam lithography, Optical testing, Projection lithography, Oxides, Doping, Etching

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years