Dr. Minjung Kim Profile

Dr. Minjung Kim

at NVIDIA

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Publications (1)

Proceedings Article | 28 April 2023 Presentation + Paper

Frequency-informed deep-learning denoising method supporting sub-nm metrology for high NA EUV lithography

Minjung Kim, Dorin Cerbu, Selim Dogru, Kumara Sastry, Gian Lorusso, Mohamed Zidan, Mohamed Saib, Joren Severi, Danilo De Simone, Vivek Singh

Proceedings Volume 12495, 124951D (2023) https://doi.org/10.1117/12.2661138

KEYWORDS: Extreme ultraviolet lithography, Photoresist technology, Line edge roughness, Critical dimension metrology, Critical dimension scanning electron microscopy, Image processing, Signal to noise ratio, Denoising, Scanning electron microscopy, Metrology, Line width roughness, Artificial intelligence, Machine learning

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