Miguel Jiménez
at Wooptix S L
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 18 September 2024 Paper
Proceedings Volume 13273, 132730T (2024) https://doi.org/10.1117/12.3026887
KEYWORDS: Photomasks, Reflection, Chromium, Quartz, Semiconducting wafers, Distortion, Wavefronts, Lithography, Overlay metrology, Phase imaging

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129553L (2024) https://doi.org/10.1117/12.3011886
KEYWORDS: Photomasks, Reflection, Chromium, Pellicles, Quartz, Semiconducting wafers, Wavefronts, Lithography, Neodymium, Phase imaging

Proceedings Article | 11 March 2024 Presentation + Paper
Proceedings Volume 12893, 128930E (2024) https://doi.org/10.1117/12.2692506
KEYWORDS: Semiconducting wafers, Silicon, Cameras, Photovoltaics, Mirrors, Wavefronts, Reflection, Data acquisition, Calibration, Phase imaging

Proceedings Article | 5 October 2023 Paper
Proceedings Volume 12802, 128020C (2023) https://doi.org/10.1117/12.2675624
KEYWORDS: Semiconducting wafers, Silicon, Data acquisition, Reflection, Wavefronts, Metals, Image sensors, Cameras, Wafer-level optics, Collimation

Proceedings Article | 28 September 2023 Presentation + Paper
Proceedings Volume 12665, 126650A (2023) https://doi.org/10.1117/12.2678349
KEYWORDS: Semiconducting wafers, Silicon, Data acquisition, Reflection, Wavefronts, Image sensors, Cameras, Wafer-level optics, Photovoltaics, Metrology

Showing 5 of 6 publications
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