Dr. Michael Schulz Profile

Dr. Michael Schulz

Retired at Physikalisch-Technische Bundesanstalt

SPIE Involvement:

Author

Publications (53)

Proceedings Article | 20 September 2023 Paper

Off-axis, slit based MTF measurements at PTB

M. Schake, H. Dierke, M. Schulz

Proceedings Volume 12607, 1260703 (2023) https://doi.org/10.1117/12.3005522

KEYWORDS: Modulation transfer functions, Cameras, Measurement uncertainty, Reproducibility, Temperature metrology, Spatial frequencies, Objectives, Microscopes, Collimators, Measurement devices

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SPIE Journal Paper | 14 September 2022 Open Access

Traceable stitching interferometry for form measurement of moderately curved freeform surfaces

Jan Spichtinger, Michael Schulz, Gerd Ehret, Rainer Tutsch

OE, Vol. 61, Issue 09, 094102, (September 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.9.094102

KEYWORDS: Stitching interferometry, Interferometers, Fizeau interferometers, Interferometry, Autocollimators, Spherical lenses, Optical engineering, Sensors, Distance measurement, Confocal microscopy

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Proceedings Article | 28 October 2021 Presentation + Paper

Impact of detector position accuracy on the MTF measurement of optical lenses

Simone Fohrmann, Patrik Erichsen, Markus Schake, Michael Schulz

Proceedings Volume 11889, 118890A (2021) https://doi.org/10.1117/12.2602744

KEYWORDS: Modulation transfer functions, Sensors, Spatial frequencies, Error analysis, Lenses, Optical design, Collimators, Monte Carlo methods, Uncertainty analysis, Statistical analysis

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Proceedings Article | 9 October 2021 Presentation + Paper

Identification of aliasing effects in measurements of unknown MTFs

Markus Schake, Michael Schulz

Proceedings Volume 11899, 118990H (2021) https://doi.org/10.1117/12.2601176

KEYWORDS: Modulation transfer functions, Cameras, Diffraction, Sensors, Microscopes, Point spread functions, Error analysis, Objectives, Fourier transforms, Device simulation

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Proceedings Article | 9 October 2021 Poster + Paper

Status of highly accurate flatness metrology at PTB for optics up to 1.5 meters in diameter

Gerd Ehret, Jan Spichtinger, Michael Schulz

Proceedings Volume 11899, 118991E (2021) https://doi.org/10.1117/12.2602680

KEYWORDS: Metrology, Deflectometry, Sensors, Optical testing, Fizeau interferometers

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Proceedings Article | 10 October 2020 Paper

Optomechanical simulations of an advanced stitching interferometer set-up for large freeform optics

Jan Spichtinger, Michael Schulz, Gerd Ehret

Proceedings Volume 11552, 115520O (2020) https://doi.org/10.1117/12.2573704

KEYWORDS: Freeform optics, Interferometers, Optical simulations, Fizeau interferometers, Optics manufacturing, Reconstruction algorithms, Optical inspection, Inspection, Metrology, Interferometry

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Proceedings Article | 8 July 2020 Paper

Setup of a new form measurement system for flat and slightly curved optics with diameters up to 1.5 metres

Gerd Ehret, Jan Spichtinger, Manuel Stavridis, Michael Schulz

Proceedings Volume 11478, 1147808 (2020) https://doi.org/10.1117/12.2564912

KEYWORDS: Sensors, Interferometers, Interferometry, Optical testing, Fizeau interferometers, Tunable lasers

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SPIE Journal Paper | 3 March 2020 Open Access

Effects of misalignments on the modulation transfer function measurement of camera lenses analyzed in optomechanical simulations

Melissa Schenker, Manuel Stavridis, Michael Schulz, Rainer Tutsch

OE, Vol. 59, Issue 03, 034101, (March 2020) https://doi.org/10.1117/12.10.1117/1.OE.59.3.034101

KEYWORDS: Modulation transfer functions, Sensors, Monte Carlo methods, Lenses, Spatial frequencies, Cameras, Error analysis, Collimators, Optical engineering, Tolerancing

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Proceedings Article | 18 November 2019 Paper

Interferometric and deflectometric flatness metrology with nanometre measurement uncertainties for optics up to 1 metre at PTB

G. Ehret, H. Reinsch, M. Schulz

Proceedings Volume 11189, 1118905 (2019) https://doi.org/10.1117/12.2538872

KEYWORDS: Interferometry, Autocollimators, Deflectometry, Zerodur, Interferometers, Optical testing, Metrology, Fizeau interferometers

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SPIE Journal Paper | 26 March 2019 Open Access

Traceability of form measurements of freeform surfaces: metrological reference surfaces

Ines Fortmeier, Michael Schulz, Rudolf Meeß

OE, Vol. 58, Issue 09, 092602, (March 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.9.092602

KEYWORDS: Manufacturing, Fizeau interferometers, Spherical lenses, Calibration, Metrology, Copper, Aspheric lenses, Interferometers, Optical spheres, Optical engineering

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Proceedings Article | 26 June 2017 Paper

Steps towards traceability for an asphere interferometer

I. Fortmeier, M. Stavridis, C. Elster, M. Schulz

Proceedings Volume 10329, 1032939 (2017) https://doi.org/10.1117/12.2269122

KEYWORDS: Manufacturing, Quality measurement, Aspheric lenses, Interferometers, Metrology, Surface finishing, Optical components, Interferometry, Optical testing, Ray tracing, Optical simulations, Optical imaging

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Proceedings Article | 15 June 2017 Paper

Flatness metrology based on small-angle deflectometric procedures with electronic tiltmeters

G. Ehret, S. Laubach, M. Schulz

Proceedings Volume 10326, 1032604 (2017) https://doi.org/10.1117/12.2268288

KEYWORDS: Metrology, Deflectometry, Autocollimators, Optical testing, Synchrotrons, Mirrors

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Proceedings Article | 25 October 2016 Paper

Comparison of small angle deflectometric measurements with different apertures down to the sub-millimetre range

Gerd Ehret, Susanne Quabis, Michael Schulz

Proceedings Volume 9687, 968702 (2016) https://doi.org/10.1117/12.2243608

KEYWORDS: Deflectometry, Sensors, Autocollimators, Image sensors, Mirrors, Interferometry, Spatial frequencies, Beam splitters, Control systems, Actuators

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Proceedings Article | 30 June 2016 Paper

Form measurement of large optics with deflectometric and interferometric procedures at PTB

Gerd Ehret, Sören Laubach, Andreas Straub, Michael Schulz

Proceedings Volume 10009, 100090B (2016) https://doi.org/10.1117/12.2235474

KEYWORDS: Optical testing, Interferometry, Deflectometry, Fizeau interferometers, Sensors, Mirrors, Optics manufacturing, Geometrical optics, Manufacturing, Interferometers

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SPIE Journal Paper | 16 March 2016

Metrological multispherical freeform artifact

Gernot Blobel, Axel Wiegmann, Jens Siepmann, Michael Schulz

OE, Vol. 55, Issue 07, 071202, (March 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.7.071202

KEYWORDS: Spherical lenses, Freeform optics, Calibration, Metrology, Optical spheres, Copper, Optics manufacturing, Interferometry, Wavefronts, Interferometers

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Proceedings Article | 22 June 2015 Paper

Traceability in interferometric form metrology

M. Schulz, G. Blobel, I. Fortmeier, M. Stavridis, C. Elster

Proceedings Volume 9525, 95251F (2015) https://doi.org/10.1117/12.2191136

KEYWORDS: Calibration, Interferometry, Interferometers, Metrology, Optical spheres, Aspheric lenses, Temperature metrology, Optical testing, Optical benches, Inverse optics

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Proceedings Article | 13 May 2013 Paper

Measurement of aspheres and free-form surfaces in a non-null test interferometer: reconstruction of high-frequency errors

Goran Baer, Johannes Schindler, Jens Siepmann, Christof Pruß, Wolfgang Osten, Michael Schulz

Proceedings Volume 8788, 878818 (2013) https://doi.org/10.1117/12.2021518

KEYWORDS: Interferometers, Aspheric lenses, Wavefronts, Spherical lenses, Optical spheres, Calibration, Interferometry, Reconstruction algorithms, Beam splitters, Cameras

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Proceedings Article | 13 May 2013 Paper

Sensitivity analysis of tilted-wave interferometer asphere measurements using virtual experiments

Ines Fortmeier, Manuel Stavridis, Axel Wiegmann, Michael Schulz, Goran Baer, Christof Pruss, Wolfgang Osten, Clemens Elster

Proceedings Volume 8789, 878907 (2013) https://doi.org/10.1117/12.2019986

KEYWORDS: Aspheric lenses, Interferometers, Wavefronts, Ray tracing, Calibration, Environmental sensing, Inverse optics, Sensors, Zernike polynomials, Virtual reality

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Proceedings Article | 27 May 2011 Paper

Some aspects of error influences in interferometric measurements of optical surface forms

M. Schulz, A. Wiegmann

Proceedings Volume 8082, 80821C (2011) https://doi.org/10.1117/12.895002

KEYWORDS: Interferometry, Interferometers, Sensors, Optical testing, Metrology, Aspheric lenses, Error analysis, Fringe analysis, Standards development, Imaging systems

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Proceedings Article | 27 May 2011 Paper

Alignment methods for ultraprecise deflectometric flatness metrology

Gerd Ehret, Michael Schulz, Arne Fitzenreiter, Maik Baier, Wolfgang Jöckel, Manuel Stavridis, Clemens Elster

Proceedings Volume 8082, 808213 (2011) https://doi.org/10.1117/12.889325

KEYWORDS: Autocollimators, Mirrors, Optical alignment, Collimation, Metrology, Deflectometry, Cameras, Optical testing, Virtual reality, 3D modeling

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Proceedings Article | 14 May 2010 Paper

Simple methods for alignment of line distance sensor arrays

H. Bremer, F. Schmähling, C. Elster, S. Krey, A. Ruprecht, M. Schulz, M. Stavridis, A. Wiegmann

Proceedings Volume 7718, 77181M (2010) https://doi.org/10.1117/12.854266

KEYWORDS: Sensors, CCD image sensors, Distance measurement, CCD cameras, Optical arrays, Colorimetry, Microscopes, Charge-coupled devices, Optical sensors, Distortion

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Proceedings Article | 17 June 2009 Paper

A model based approach to reference-free straightness measurement at the Nanometer Comparator

C. Weichert, M. Stavridis, M. Walzel, C. Elster, A. Wiegmann, M. Schulz, R. Köning, J. Flügge, R. Tutsch

Proceedings Volume 7390, 73900O (2009) https://doi.org/10.1117/12.827681

KEYWORDS: Sensors, Error analysis, Interferometers, Mirrors, Microscopes, Computer programming, Calibration, Environmental sensing, Virtual reality, Head

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Proceedings Article | 12 January 2009 Paper

Interferometry at the PTB Nanometer Comparator: design, status and development

J. Flügge, Ch. Weichert, H. Hu, R. Köning, H. Bosse, A. Wiegmann, M. Schulz, C. Elster, R. Geckeler

Proceedings Volume 7133, 713346 (2009) https://doi.org/10.1117/12.821252

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Proceedings Article | 17 October 2008 Paper

Development of a 1.5D reference comparator for position and straightness metrology on photomasks

J. Flügge, R. Köning, Ch. Weichert, W. Häßler-Grohne, R. Geckeler, A. Wiegmann, M. Schulz, C. Elster, H. Bosse

Proceedings Volume 7122, 71222Y (2008) https://doi.org/10.1117/12.801251

KEYWORDS: Interferometers, Photomasks, Metrology, Mirrors, Computer programming, Calibration, Sensors, Microscopes, Beam splitters, Image registration

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Proceedings Article | 18 June 2007 Paper

Stability analysis for the TMS method: Influence of high spatial frequencies

Axel Wiegmann, Clemens Elster, Ralf Geckeler, Michael Schulz

Proceedings Volume 6616, 661618 (2007) https://doi.org/10.1117/12.726116

KEYWORDS: Sensors, Interferometers, Distortion, Spatial frequencies, Computer simulations, Optical scanning systems, Interferometry, Distance measurement, Autocollimators, Wavefronts

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The Traceable Multi Sensor (TMS) system is a scanning system for the measurement of the topography of large optical surfaces. The system uses a compact interferometer with an aperture of some millimetres to realize multiple distance sensors and an autocollimator for the angle measurement. In contrast to common stitching techniques, the systematic sensor errors are calculated in addition to the entire topography by the TMS algorithm. Additionally, piston and tilt at each position of the interferometer are determined by the algorithm. An essential requirement for the algorithm is the exact lateral positioning of the sensor at given locations. The goal of this paper is to investigate the influence of a class of error sources on the resulting topography estimation using computer simulations. The errors of this class result in inexact measurement positions of the distance sensors. Especially the lateral positioning errors of the scanning stage lead to increasing errors for short wavelengths. For topography wavelengths below 3mm with an amplitude of 100nm the resulting topography error increases to 3nm and more. For longer wavelengths the positioning errors are no longer the dominant error source and the root mean square error of the resulting topography is approximately 1 nm for positioning errors with a standard deviation of 5 &mgr;m. The pixel distance error and distortion of the interferometer strongly influence the topography measurement of specimens with large deviations from a plane. The simulations show that for a topography with a peak to valley of 50 &mgr;m the root mean square error of the reconstructed topography is below 10 nm. Furthermore, a possibility to compensate the lateral positioning error of the scanning stage is presented which makes the TMS method nearly independent of positioning errors of the scanning stage. As a consequence, it is possible to use systems of non equidistant distance sensors whose lateral distances are independent of the positioning interval.

SPIE Journal Paper | 1 June 2006 Open Access

Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution

Michael Schulz, Clemens Elster

OE, Vol. 45, Issue 06, 060503, (June 2006) https://doi.org/10.1117/12.10.1117/1.2208568

KEYWORDS: Sensors, Interferometers, Head, Error analysis, Autocollimators, Chemical elements, Mathematical modeling, Distance measurement, Metrology, Spherical lenses

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Proceedings Article | 15 September 2005 Paper

Scanning form measurement for curved surfaces

Michael Schulz, Ralf Geckeler

Proceedings Volume 5921, 592106 (2005) https://doi.org/10.1117/12.614790

KEYWORDS: Sensors, Interferometers, Autocollimators, CCD image sensors, Calibration, Charge-coupled devices, Mirrors, Distance measurement, Spherical lenses, Image resolution

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Proceedings Article | 31 August 2005 Paper

Traceable multiple sensor system for absolute form measurement

Michael Schulz, Joachim Gerhardt, Ralf Geckeler, Clemens Elster

Proceedings Volume 5878, 58780A (2005) https://doi.org/10.1117/12.614726

KEYWORDS: Sensors, Autocollimators, Interferometers, Calibration, CCD image sensors, Distance measurement, Charge-coupled devices, Sensor calibration, Imaging systems, Spatial resolution

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Proceedings Article | 13 June 2005 Paper

High-accuracy profile form measurement by a scanning system consisting of an angle sensor and coupled distance sensors

Joachim Gerhardt, Ralf Geckeler, Michael Schulz, Clemens Elster

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612492

KEYWORDS: Sensors, Distance measurement, Interferometers, Error analysis, Autocollimators, Calibration, Optical scanning systems, CCD image sensors, Optical testing, Mathematical modeling

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Proceedings Article | 10 September 2004 Paper

Practical aspects of curvature detection for LACS free-form measuring systems

Michael Schulz, Joachim Gerhardt, Clemens Elster

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.545498

KEYWORDS: Data modeling, Interferometers, Sensors, Optical spheres, Aspheric lenses, Optimization (mathematics), System integration, Calibration, Wavefronts, Particles

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Proceedings Article | 20 November 2003 Paper

High-accuracy form measurement of large optical surfaces

Michael Schulz, Ralf Geckeler, Jens Illemann

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.503700

KEYWORDS: Calibration, Sensors, Autocollimators, Interferometers, Prisms, Zerodur, Optical testing, Deflectometry, Spherical lenses, Time metrology

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Proceedings Article | 4 November 2003 Paper

Low- and mid-spatial-frequency component measurement for aspheres

Michael Schulz, Ingolf Weingaertner, Clemens Elster, Joachim Gerhardt

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.503699

KEYWORDS: Sensors, Interferometers, Stitching interferometry, Aspheric lenses, Spatial frequencies, 3D modeling, CCD image sensors, 3D scanning, Cameras, 3D metrology

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Proceedings Article | 30 May 2003 Paper

Uncertainty of topography determination based on slope difference or curvature measuring systems in laboratory and industrial environments

Michael Schulz

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500425

KEYWORDS: Sensors, Calibration, Interferometers, Time metrology, Prisms, Autocollimation, Telescopes, Environmental sensing, Distance measurement, Chemical elements

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Proceedings Article | 11 November 2002 Paper

Novel concept for the ultraprecise and fast measurement of the nanotopography of large wafers

Ingolf Weingaertner, Matthias Wurm, Ralf Geckeler, Clemens Elster, Michael Schulz, Eugen Dumitrescu, Stefan Krey, Josef Heinisch

Proceedings Volume 4779, (2002) https://doi.org/10.1117/12.451713

KEYWORDS: Semiconducting wafers, Measurement devices, Spatial frequencies, Distance measurement, Interferometers, Reconstruction algorithms, Algorithm development, Sensors, Wafer-level optics, Deflectometry

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The measurement of the topography or the nanotopography of large wafers up to 450 mm in diameter with satisfactory lateral resolution and nanometer uncertainty is still an unsolved problem. The topography of wafers covers a relatively large measurement range as wafers have surfaces with a so-called "slightly unflat" topography which mostly exceeds the measurement capabilities of interferometers. For the ultraprecise and traceable measurement of the slope and topography of slightly unflat optical surfaces, a novel scanning deflectometry principle has been developed. An uncertainty of the topography in the nanometer range will be achieved, as this principle minimizes error influences and allows a highly precise calibration of the angle measuring device. The main goal is to use this principle for the ultraprecise measurement of the nanotopography of large wafers. The measurement principle is based on the analysis of differences of reflection angles obtained at surface points which are separated by large lateral shears. It does not rely on external reference surfaces of matched topography and in first and second order is independent of any stage errors and the whole-body motion of the specimen. The measurands are directly traced back to the base units of angle and length. The specific idea of wafer measurement is to combine rotational and linear scanning with the measurement of slope difference vectors and to arrive at an unambiguous solution for the topography and nanotopography. The equations with the slope difference vectors are solved to reconstruct the slope vectors, as newly developed mathematical algorithms allow the surface slope to be reconstructed from slope differences for two different shears. This is reached by applying natural extensions and shearing transfer functions by a mathematically exact method over the whole surface area. Further the differential equations for the slope vectors are solved to unambiguously reconstruct the topography. With this method it is possible to achieve nanometer uncertainty and at the same time a high lateral resolution, short measurement times and the possibility of mastering the large measurement range necessary for slightly unflat wafer surfaces.

Proceedings Article | 19 June 2002 Paper

High-accuracy interferometric measurement of aspheres

Ingolf Weingaertner, Michael Schulz

Proceedings Volume 4778, (2002) https://doi.org/10.1117/12.473533

KEYWORDS: Aspheric lenses, Interferometry, Aspheric optics, Distance measurement, Wavefronts, Sensors, EUV optics, Optical spheres, Spatial frequencies, Interferometers

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Proceedings Article | 19 June 2002 Paper

Simultaneous distance, slope, curvature, and shape measurement with a multipurpose interferometer

Ingolf Weingaertner, Michael Schulz, Clemens Elster, Joachim Gerhardt, Axel Lucas

Proceedings Volume 4778, (2002) https://doi.org/10.1117/12.473554

KEYWORDS: Interferometers, Wavefronts, Distance measurement, Data modeling, Sensors, Interferometry, Aspheric lenses, Objectives, Monochromatic aberrations, Cameras

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Proceedings Article | 27 December 2001 Paper

Analysis of the uncertainty of the ultraprecise large-area curvature scanning technique for measuring steep aspheres and complex surfaces

Ingolf Weingaertner, Michael Schulz

Proceedings Volume 4451, (2001) https://doi.org/10.1117/12.453631

KEYWORDS: Sensors, Aspheric lenses, Calibration, Interferometers, Spherical lenses, Interferometry, Aspheric optics, Optical spheres, Wavefronts, Imaging systems

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Proceedings Article | 10 December 2001 Paper

Measurement of steep aspheres: a step forward to nanometer accuracy

Ingolf Weingaertner, Michael Schulz, Peter Thomsen-Schmidt, Clemens Elster

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450095

KEYWORDS: Sensors, Calibration, Interferometers, Aspheric lenses, Optical spheres, Wavefronts, Distance measurement, Interferometry, Phase shift keying, Algorithm development

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Proceedings Article | 22 October 2001 Paper

Tracing back radius of curvature and topography to the base unit of length with ultraprecision

Ingolf Weingaertner, Michael Schulz, Ralf Geckeler, Otto Jusko, Michael Neugebauer, Arnold Nicolaus, Gerhard Boensch

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445618

KEYWORDS: Optical spheres, Calibration, Sensors, Aspheric lenses, Interferometers, Spherical lenses, Wavefronts, Sensor calibration, Mirrors, Manufacturing

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Proceedings Article | 2 November 2000 Paper

Methods, error influences, and limits for the ultraprecise measurement of slope and figure for large, slightly nonflat, or steep complex surfaces

Ingolf Weingaertner, Michael Schulz, Peter Thomsen-Schmidt

Proceedings Volume 4099, (2000) https://doi.org/10.1117/12.405814

KEYWORDS: Sensors, Aspheric lenses, Interferometers, Optical lithography, Motion measurement, Error analysis, Interferometry, Lenses, Optical spheres, Calibration

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Proceedings Article | 29 September 2000 Paper

Reliable curvature sensor for measuring the topography of complex surfaces

Michael Schulz, Peter Thomsen-Schmidt, Ingolf Weingaertner

Proceedings Volume 4098, (2000) https://doi.org/10.1117/12.401614

KEYWORDS: Sensors, Aspheric lenses, Calibration, Interferometers, Motion measurement, Manufacturing, Distance measurement, Sensor calibration, Optical spheres, Interferometry

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Proceedings Article | 29 September 2000 Paper

Facility for the curvature-based measurement of the nanotopography of complex surfaces

Peter Thomsen-Schmidt, Michael Schulz, Ingolf Weingaertner

Proceedings Volume 4098, (2000) https://doi.org/10.1117/12.401615

KEYWORDS: Sensors, Head, Interferometers, Aspheric lenses, Distance measurement, Interferometry, Wavefronts, Spherical lenses, Calibration, Optical lithography

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Proceedings Article | 11 November 1999 Paper

Novel scanning technique for ultraprecise measurement of topography

Ingolf Weingaertner, Michael Schulz, Clemens Elster

Proceedings Volume 3782, (1999) https://doi.org/10.1117/12.369198

KEYWORDS: Prisms, Calibration, Distance measurement, Aspheric lenses, Interferometry, Error analysis, Optical scanning, Optical spheres, Fourier transforms, Manufacturing

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Proceedings Article | 9 September 1999 Paper

Avoidance and elimination of errors in optical scanning

Michael Schulz, Ingolf Weingaertner

Proceedings Volume 3823, (1999) https://doi.org/10.1117/12.360981

KEYWORDS: Prisms, Optical scanning, Sensors, Autocollimation, Telescopes, Polarizers, Space telescopes, Manufacturing, Motion measurement, Modulators

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Proceedings Article | 6 September 1999 Paper

Novel scanning technique for ultraprecise measurement of slope and topography of flats, aspheres, and complex surfaces

Ingolf Weingaertner, Michael Schulz

Proceedings Volume 3739, (1999) https://doi.org/10.1117/12.360154

KEYWORDS: Prisms, Aspheric lenses, Distance measurement, Lenses, Calibration, Algorithm development, Interferometry, Optical testing, Optical scanning, Prototyping

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Proceedings Article | 6 September 1999 Paper

High-definition illuminated table for optical testing

Michael Schulz, Egbert Buhr, Kai Marholdt, Winfried Willemer, Detlef Bergmann

Proceedings Volume 3739, (1999) https://doi.org/10.1117/12.360185

KEYWORDS: Lamps, Cameras, Glasses, Modulation transfer functions, Tungsten, Monte Carlo methods, Optical testing, Camera shutters, Photography, Digital photography

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Proceedings Article | 1 November 1997 Paper

New methods for measuring wave aberrations of high-quality imaging systems over an extended image field

Ingolf Weingaertner, Michael Schulz, Stefan Loheide, Ludolf Schneider

Proceedings Volume 3134, (1997) https://doi.org/10.1117/12.295143

KEYWORDS: Optical spheres, Wavefronts, Interferometers, Imaging systems, Interferometry, Optical transfer functions, Shearing interferometers, Image analysis, Lenses, Wavefront aberrations

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Proceedings Article | 1 November 1997 Paper

Tandem shearing interferometer with large shears for complete wavefront reconstruction

Stefan Loheide, Michael Schulz

Proceedings Volume 3134, (1997) https://doi.org/10.1117/12.279131

KEYWORDS: Wavefronts, Shearing interferometers, Interferometers, Interferometry, Wavefront reconstruction, Fourier transforms, Solids, Wavefront aberrations, Electroluminescence, Imaging systems

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Proceedings Article | 19 December 1996 Paper

Measurement technique for the characterization of electronic still picture cameras

Michael Schulz

Proceedings Volume 2950, (1996) https://doi.org/10.1117/12.262526

KEYWORDS: Cameras, Modulation transfer functions, Imaging systems, Standards development, Spatial frequencies, Photography, Data processing, Digital imaging, Image sensors, CCD image sensors

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SPIE Journal Paper | 1 November 1995

Highly accurate optical transfer function measurements: a new concept for the elimination of thermal expansion effects

Michael Schulz

OE, Vol. 34, Issue 11, (November 1995) https://doi.org/10.1117/12.10.1117/12.212981

KEYWORDS: Optical transfer functions, Thermal effects, Modulation transfer functions, Calibration, Imaging systems, Lenses, Temperature metrology, 3D image processing, Optical testing, Photography

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Proceedings Article | 15 November 1994 Paper

Computer-controlled high accuracy optical measurement

Michael Schulz

Proceedings Volume 2248, (1994) https://doi.org/10.1117/12.194341

KEYWORDS: Modulation transfer functions, Optical transfer functions, Sensors, Temperature metrology, Lenses, Optical testing, Spatial frequencies, Modulation, Data storage, Calibration

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Proceedings Article | 1 January 1993 Paper

Improvements in OTF measurement technique

Michael Schulz

Proceedings Volume 1781, (1993) https://doi.org/10.1117/12.140983

KEYWORDS: Modulation transfer functions, Optical transfer functions, Spatial frequencies, Modulation, Optical testing, Sensors, Signal detection, Data processing, Phase transfer function, Optical benches

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Proceedings Article | 1 January 1993 Paper

Interferometric methods for the measurement of wavefront aberrations

Ingolf Weingaertner, Michael Schulz

Proceedings Volume 1781, (1993) https://doi.org/10.1117/12.140978

KEYWORDS: Interferometers, Wavefront aberrations, Interferometry, Optical testing, Wavefronts, Shearing interferometers, Mirrors, Optical transfer functions, Imaging systems, Optical components

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