Dr. Michael Fritze
at Potomac Institute for Policy Studies
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 24 February 2021 Presentation
Proceedings Volume 11610, 1161004 (2021) https://doi.org/10.1117/12.2593229

Proceedings Article | 6 May 2005 Paper
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.612856
KEYWORDS: Photomasks, Lithography, Photoresist materials, Maskless lithography, Hybrid optics, Optical lithography, Image resolution, Binary data, Critical dimension metrology, Projection lithography

Proceedings Article | 3 May 2004 Paper
Proceedings Volume 5379, (2004) https://doi.org/10.1117/12.536369
KEYWORDS: Lithography, Photomasks, Resolution enhancement technologies, Spatial frequencies, Electronic design automation, Optical lithography, Image compression, Phase shifts, Optical proximity correction, Manufacturing

Proceedings Article | 29 December 2003 Paper
Evgeny Popov, John Hoose, Robert Frankel, C. Keast, M. Fritze, T. Fan, D. Yost, S. Rabe
Proceedings Volume 5184, (2003) https://doi.org/10.1117/12.504701
KEYWORDS: Silicon, Polarization, Diffraction gratings, Manufacturing, Etching, Wavelength division multiplexing, Diffraction, Crystals, Optical design, Aluminum

Proceedings Article | 10 July 2003 Paper
Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.485244
KEYWORDS: Photomasks, Lithography, Resolution enhancement technologies, Semiconducting wafers, Phase shifts, Optical proximity correction, Spatial frequencies, Computer aided design, Wafer-level optics, Neodymium

Showing 5 of 18 publications
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