Excellent performance of hologon deflectors has resulted in the design and manufacture of high-resolution laser scanning systems which utilize simple spherical optics, and have very high output accuracy. However, for flat-field systems an f-theta scan lens is needed, and cost- effective production designs force the f-theta distortion figures to 0.05% and above. Hence, for higher accuracy requirements, the residual spot placement errors must be corrected differently. In this paper, the authors describe the work undertaken to compensate for the f- theta distortion of a scan lens in a holographic deflector system used for master artwork generation. This system employs a monofacet hologon operating at the green HeNe wavelength (544 nm), produces 200 scans per second, and is capable to address >4000 dots per inch. The authors also present the results of the compensation technique which employs pixel position modulation, and reduces the 0.1% residual scan lens f-theta distortion to a level below 0.003%, as required for a <15 micrometers dot placement error at any point along the 470 mm scan field.
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