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Masahiko Tsukuda
at Panasonic Corp
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Publications (1)
Proceedings Article | 9 September 2004 Paper
Accomplishment of Blu-ray disc ROM by electron beam recording: dual layer with 50-GB capacity
Masahiko Tsukuda, Eiichi Ito, Morio Tomiyama, Shinya Abe, Eiji Ohno, Stephane David, Martin Dubs, Chris Bayliss, Colin Dix, Nick Ogilvie, Simon Proffitt, David Scott-Maxwell, Bernard Fantin, Thomas Eisenhammer
Proceedings Volume 5380, (2004) https://doi.org/10.1117/12.567973
KEYWORDS: Electron beams, Prototyping, Dynamical systems, Scanning electron microscopy, Electromagnetism, Chemically amplified resists, Reflectivity, Diffusion, Control systems, Objectives
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