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Marziogiuseppe Gentile
at imec
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Publications (1)
Proceedings Article | 1 May 2023 Presentation + Paper
Dissociative photoionization of EUV lithography photoresist models
Marziogiuseppe Gentile, Marius Gerlach, Robert Richter, Michiel van Setten, John Petersen, Paul van der Heide, Fabian Holzmeier
Proceedings Volume 12498, 124980S (2023) https://doi.org/10.1117/12.2657702
KEYWORDS: Electrons, Extreme ultraviolet, Photons, Extreme ultraviolet lithography, Photoresist materials, Ionization, Molecules, Chemistry, Ions
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