Dr. Mary E. Coles Profile

Dr. Mary E. Coles

Member of Technical Staff at Texas Instruments Inc

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Author

Publications (3)

Proceedings Article | 7 March 2008 Paper

Automated method of detecting SRAF and sidelobe printing with automated CD-SEM recipes

Mary Coles, Yong Seok Choi, Kyoungmo Yang, Cindy Parker, Andy Self

Proceedings Volume 6924, 692430 (2008) https://doi.org/10.1117/12.775808

KEYWORDS: SRAF, Optical proximity correction, Printing, Data modeling, Scanning electron microscopy, Edge detection, Space operations, Reticles, Distance measurement

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Proceedings Article | 21 March 2006 Paper

Minimization of sidelobes in rectangular contact/via hole structures

Mary Coles, Mark Somervell

Proceedings Volume 6154, 61543Z (2006) https://doi.org/10.1117/12.658784

KEYWORDS: Printing, Scanners, Photomasks, Semiconducting wafers, Reticles, Critical dimension metrology, Scanning electron microscopy, Phase shifts, Constructive interference, Monochromatic aberrations

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Proceedings Article | 14 March 2006 Paper

Accurate OPC model generation through use of a streamlined data flow incorporating automated test-structure layout and CD-SEM recipe generation

Mary Coles, Lewis Flanagin, Ben Rathsack, Steve Prins, James Blatchford

Proceedings Volume 6156, 615614 (2006) https://doi.org/10.1117/12.660600

KEYWORDS: Data modeling, Optical proximity correction, Scanning electron microscopy, SRAF, Semiconducting wafers, Photomasks, Image filtering, Process modeling, Error analysis, Data processing

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