Dr. Marco Russ Profile

Dr. Marco Russ

at Fraunhofer-IMS

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 21 May 2011 Paper

Improvements of a digital 25 µm pixel-pitch uncooled amorphous silicon TEC-less VGA IRFPA with massively parallel Sigma-Delta-ADC readout

Dirk Weiler, Marco Ruß, Daniel Würfel, Renee Lerch, Pin Yang, Jochen Bauer, Jennifer Heß, Piotr Kropelnicki, Holger Vogt

Proceedings Volume 8012, 80121F (2011) https://doi.org/10.1117/12.883791

KEYWORDS: Microbolometers, Amorphous silicon, Ceramics, Semiconducting wafers, Readout integrated circuits, Thermography, Resistance, Packaging, Electro optics, Analog electronics

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Proceedings Article | 28 October 2010 Paper

Fabrication method for chip-scale-vacuum-packages based on a chip-to-wafer-process

J. Bauer, D. Weiler, M. Ruß, J. Heß, P. Yang, J. Voß, N, Arnold, H. Vogt

Proceedings Volume 7834, 78340S (2010) https://doi.org/10.1117/12.865019

KEYWORDS: Semiconducting wafers, Tin, Bolometers, Infrared bolometers, Infrared radiation, Packaging, Reflectivity, Wafer bonding, Sensors, Plating

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Proceedings Article | 4 May 2010 Paper

A digital 25 µm pixel-pitch uncooled amorphous silicon TEC-less VGA IRFPA with massive parallel Sigma-Delta-ADC readout

Dirk Weiler, Marco Russ, Daniel Würfel, Renee Lerch, Pin Yang, Jochen Bauer, Holger Vogt

Proceedings Volume 7660, 76600S (2010) https://doi.org/10.1117/12.849839

KEYWORDS: Microbolometers, Amorphous silicon, Thermography, Semiconducting wafers, Bolometers, Modulators, Electro optics, Packaging, Antireflective coatings, Analog electronics

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Proceedings Article | 14 May 2007 Paper

The geometric design of microbolometer elements for uncooled focal plane arrays

M. Ruß, J. Bauer, H. Vogt

Proceedings Volume 6542, 654223 (2007) https://doi.org/10.1117/12.719224

KEYWORDS: Microbolometers, Bolometers, Amorphous silicon, Absorption, Metals, Tin, Oxides, Optical resonators, Silicon films, Staring arrays

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