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Mankyu Kang
at SAMSUNG Electronics Co Ltd
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Publications (2)
Proceedings Article | 27 March 2014 Paper
Inorganic resist materials based on zirconium phosphonate for atomic force microscope lithography
Mankyu Kang, Seonae Kim, JinHyuck Jung, Heebom Kim, Inkyun Shin, Chanuk Jeon, Haiwon Lee
Proceedings Volume 9051, 90511U (2014) https://doi.org/10.1117/12.2045641
KEYWORDS: Lithography, Zirconium, Atomic force microscopy, Metals, Coating, Image processing, Electron beam lithography, Oxides, Atomic force microscope, Line edge roughness
Proceedings Article | 30 October 2007 Paper
The study of CD error in mid-local pattern area caused by develop loading effect
Man-Kyu Kang, Jung-Hun Lee, Seong-Yoon Kim, Byung-Gook Kim, Sang-Gyun Woo, Han-Ku Cho
Proceedings Volume 6730, 67300H (2007) https://doi.org/10.1117/12.746565
KEYWORDS: Critical dimension metrology, Photoresist developing, Photoresist materials, Error analysis, Chemical analysis, Photoresist processing, Process control, Photomasks, Control systems, Electron beams
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