Dr. Maharaj Mukherjee Profile

Dr. Maharaj Mukherjee

at GLOBALFOUNDRIES Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 12 May 2005 Paper

The problem of optimal placement of sub-resolution assist features (SRAF)

Maharaj Mukherjee, Scott Mansfield, Lars Liebmann, Alexey Lvov, Evanthia Papadapoulou, Mark Lavin, Zengqin Zhao

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.599884

KEYWORDS: SRAF, Photomasks, Manufacturing, Lithography, Resolution enhancement technologies, Spatial frequencies, Optical proximity correction, Algorithms, Printing, Very large scale integration

Read Abstract +

Proceedings Article | 26 June 2003 Paper

Optical rule checking for proximity-corrected mask shapes

Maharaj Mukherjee, Zachary Baum, John Nickel, Timothy Dunham

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485477

KEYWORDS: Optical proximity correction, Photomasks, Semiconducting wafers, Calibration, Image segmentation, Manufacturing, Optics manufacturing, Wafer-level optics, Optical simulations, Computer simulations

Read Abstract +

Proceedings Article | 30 July 2002 Paper

Improved line-end foreshortening and corner-rounding control in optical proximity correction using radius of curvature method

Maharaj Mukherjee, Vinhthuy Phan

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474487

KEYWORDS: Photomasks, Semiconducting wafers, Optical proximity correction, Linear filtering, Lithography, Model-based design, Ear, Spatial frequencies, Manufacturing, Image processing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years