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Maggy Harake
at Stanford Univ
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Publications (2)
Proceedings Article | 10 April 2024 Presentation
Applying area-selective atomic layer deposition for high-precision pattern transfer
Yujin Lee, Maggy Harake, Beihang Yu, Ricardo Ruiz, Stacey Bent
Proceedings Volume PC12956, PC129560T (2024) https://doi.org/10.1117/12.3012187
KEYWORDS: Atomic layer deposition, Adsorption, X-ray photoelectron spectroscopy, Stochastic processes, Optical lithography, Extreme ultraviolet, Chemical reactions, Chemical analysis, Semiconductors, Polystyrene
Proceedings Article | 10 April 2024 Presentation
Polypeptoid brushes as growth-promoters in vapor phase infiltration for area-selective deposition of aluminum oxide hard masks
Beihang Yu, Maggy Harake, Yujin Lee, Stacey Bent, Ricardo Ruiz
Proceedings Volume PC12956, PC129560S (2024) https://doi.org/10.1117/12.3011335
KEYWORDS: Photomasks, Metal oxides, Atomic layer deposition, Silicon, Lithography, Semiconductor manufacturing, Reactive ion etching, Polystyrene, Polymers, Optical lithography
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