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Dr. Lucas Rencker
at Nearfield Instruments BV
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
Image resolution enhancement for advanced semiconductor nodes
L. Rencker, O. Tajalizadehkhoob, K. Elsayed, A. Khachaturiants, H. Pahlavani, Y. Guo, J. van de Laar, E. Simons, N. Saikumar, H. Sadeghian
Proceedings Volume 12955, 129553J (2024) https://doi.org/10.1117/12.3011239
KEYWORDS: Image enhancement, Image resolution, Resolution enhancement technologies, Scanning probe microscopy, Machine learning, Semiconductors, Metrology, Image restoration
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