Mr. Luc Rynders Profile

Luc Rynders

at imec

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Publications (1)

Proceedings Article | 12 October 2021 Presentation + Paper

28nm-pitch Ru interconnects patterned with a 0.33NA-EUV single exposure

Sayantan Das, Nicola Kissoon, Mahmudul Hasan, Luc Rynders, Luka Kljucar, Sandip Halder, Philippe Leray, Mircea Dusa, David Rio, Mahmoud Mohsen, Chris Spence, Etienne De Poortere

Proceedings Volume 11854, 118540C (2021) https://doi.org/10.1117/12.2600937

KEYWORDS: Stochastic processes, Semiconducting wafers, Ruthenium, Inspection, Extreme ultraviolet lithography, Line edge roughness

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