Dr. Liping Cui Profile

Dr. Liping Cui

at GlobalFoundries

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Publications (1)

Proceedings Article | 2 April 2014 Paper

Mean offset optimization for multi-patterning overlay using Monte Carlo simulation method

Wenhui Wang, Liping Cui, Lei Sun, Ryoung-Han Kim

Proceedings Volume 9050, 90502O (2014) https://doi.org/10.1117/12.2046580

KEYWORDS: Optical alignment, Monte Carlo methods, Overlay metrology, Optical lithography, Tolerancing, Lithography, Double patterning technology, Control systems, Manufacturing, Extreme ultraviolet lithography

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