In this paper, a whole general design and optimization process is detailedly demonstrated by taking the design and optimization of a 55mm diameter variable curvature mirror(VCM) with a cycloid-like thickness distribution as example. The finite-element analysis to the VCM under each change of main structure parameter is done and analyzed to choose the proper parameter value of each structure to obtain the optimum surface figure accuracy. Finally, the designed VCM can achieve 0.386mm central deflection and RMS 82.84nm within the effective aperture 28.4mm.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.