Mr. Lee-Feng Chen Profile

Lee-Feng Chen

at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

EUV APSM mask prospects and challenges

Shy-Jay Lin, Chien-Min Lee, Yen-Liang Chen, Kuo-Lun Tai, Lee-Feng Chen, Chien-Chao Huang, Frankie F. Tsai

Proceedings Volume 12751, 127510N (2023) https://doi.org/10.1117/12.2688111

KEYWORDS: 3D mask effects, Extreme ultraviolet, Extreme ultraviolet lithography, Thermal stability, Stochastic processes, Semiconducting wafers, Refractive index, Projection systems, Photoresist materials, Photons

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