Mr. Kwon Lim Profile

Kwon Lim

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 25 September 2010 Paper

An analysis of correlation between scanning direction and defect detection at ultra high resolution

Kwon Lim, SungPil Choi, Wonil Cho, Dong Hoon Chung, Chan-Uk Jeon, HanKu Cho

Proceedings Volume 7823, 782334 (2010) https://doi.org/10.1117/12.866017

KEYWORDS: Inspection, Photomasks, Sensors, Extreme ultraviolet lithography, Image processing, Defect detection, Image quality, Image sensors, Extreme ultraviolet, Semiconducting wafers

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Proceedings Article | 20 May 2006 Paper

Novel mask inspection flow for better defect review and analysis

Kwon Lim, Jin Hyung Park, Dong Hoon Chung, Seong Woon Choi, Woo Sung Han, Hideo Takizawa, Kouji Miyazaki

Proceedings Volume 6283, 62830Z (2006) https://doi.org/10.1117/12.681858

KEYWORDS: Inspection, Photomasks, Defect inspection, Defect detection, Mask making, Image processing, Manufacturing, Deep ultraviolet, Telecommunications, Semiconductors

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