Dr. Kouros Ghandehari Profile

Dr. Kouros Ghandehari

Process Engineer at Advanced Micro Devices

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Publications (2)

Proceedings Article | 28 July 1997 Paper

Automated OPC for application in advanced lithography

Kurt Ronse, Alexander Tritchkov, John Randall, Rik Jonckheere, Kouros Ghandehari, Luc Van den Hove

Proceedings Volume 3096, (1997) https://doi.org/10.1117/12.277300

KEYWORDS: Optical proximity correction, Lithography, Photomasks, Optical lithography, Reticles, Deep ultraviolet, Printing, Mask making, Data modeling, Optics manufacturing

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Proceedings Article | 7 July 1997 Paper

NA/sigma optimization strategies for an advanced DUV stepper applied to 0.25- and sub-0.25-um critical levels

Maaike Op de Beeck, Kurt Ronse, Kouros Ghandehari, Patrick Jaenen, Harry Botermans, Jo Finders, John Lilygren, Daniel Baker, Geert Vandenberghe, Peter De Bisschop, Mireille Maenhoudt, Luc Van den Hove

Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.275973

KEYWORDS: Deep ultraviolet, Logic, Photoresist processing, Dry etching, Etching

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