The incident power on the 1st optics at a standard undulator beamline of SPring-8 is typically 300W and reach up to 600 W at the maximum. Thermal distortion of the 1st optical elements such as crystals and mirrors affects the wavefront of the beam. For next-generation light sources such as SPring-8-II, proper cooling and element support to reduce distortion of optics is an even more important issue. Therefore we are developing an in-situ metrology to evaluate the deformation of optical surface under heat load. Combining in-situ measurements with simulations, new cooling system has been developed and introduced into beamlines. In this talk, we will introduce some examples of these methods.
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