Mr. Kenichi Takenouchi Profile

Kenichi Takenouchi

at Hitachi High-Tech America Inc

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Author

Publications (2)

Proceedings Article | 10 May 2005 Paper

Monitoring method for automated CD-SEM recipes

Tatsuya Maeda, Satoru Iwama, Makoto Nishihara, Daniel Berger, Andrew Berger, Kazuhiro Ueda, Takenouchi Kenichi, Takashi Iizumi

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.601107

KEYWORDS: Video, Semiconducting wafers, Scanning electron microscopy, Video compression, Image resolution, RGB color model, Image compression, Prototyping, Error analysis, Semiconductor manufacturing

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Proceedings Article | 10 May 2005 Paper

Information server test case: the effects of probe current stability on CD-SEM measurement

Susan Redmond, Ron Weller, Richard Tomasco, Bill Keese, Nick Spaniola, Tatsuya Maeda, Kenichi Takenouchi, Lorena Page, Alex Danilevsky, Roger Williams, Daniel Berger, Brandon Ward

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599062

KEYWORDS: Scanning electron microscopy, Metrology, Optical alignment, Edge detection, Objectives, Local area networks, Silicon, Modulation, Semiconductor manufacturing, Environmental monitoring

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