CONFERENCE PROCEEDINGS
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Kelsey E. Brakensiek
at Brewer Science Inc
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Author
Publications (4)
Proceedings Article | 9 April 2024 Presentation + Paper
Lithography performance improvement of MOR by underlayers
Si Li, Xinlin Lu, Stephen Grannemann, Daniel Sweat, Kelsey Brakensiek, Pengtao Lu, Joyce Lowes, Vandana Krishnamurthy, Veerle Van Driessche, Douglas Guerrero
Proceedings Volume 12957, 1295715 (2024) https://doi.org/10.1117/12.3010887
KEYWORDS: Polymers, Film thickness, Lithography, Extreme ultraviolet lithography, Semiconducting wafers, Coating, Tin, Silicon, Diffusion
Proceedings Article | 9 April 2024 Poster + Paper
Understanding and improving performance of 14-nm HP EUV lithography via rational design of materials
Proceedings Volume 12957, 129571T (2024) https://doi.org/10.1117/12.3010498
KEYWORDS: Polymers, Extreme ultraviolet lithography, Line width roughness, Lithography, Adhesives, Adhesion, Extreme ultraviolet
Proceedings Article | 1 May 2023 Presentation + Paper
Novel assist layers to enhance EUV lithography performance of photoresists on different substrates
Proceedings Volume 12498, 124980N (2023) https://doi.org/10.1117/12.2658529
KEYWORDS: Semiconducting wafers, Extreme ultraviolet lithography, Coating, Coating thickness, Silicon, Photoresist materials, Adhesion, Line width roughness, Resistance, Adhesives
Proceedings Article | 25 May 2022 Presentation + Paper
Realization of sub-30-pitch EUV lithography through the application of functional spin-on glass
Proceedings Volume 12055, 120550A (2022) https://doi.org/10.1117/12.2610985
KEYWORDS: Extreme ultraviolet lithography, Adhesives, Polymers, Etching, Plasma etching, Optical lithography, Semiconducting wafers
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