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Keitaro Ikejiri
at Taiyo Nippon Sanso Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 8 March 2024 Presentation + Paper
Crack-free growth of UVC LEDs on 6-inch sapphire substrates using face-to-face high-temperature annealed AlN by production scale MOCVD
Proceedings Volume 12886, 128860B (2024) https://doi.org/10.1117/12.2692614
KEYWORDS: Light emitting diodes, Metalorganic chemical vapor deposition, Annealing, Aluminum gallium nitride
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