Ms. Kay Peng Profile

Kay Peng

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Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

Defect characterization of 28 nm pitch EUV single patterning structures for iN5 node

Kaushik Sah, Sayantan Das, Andrew Cross, Kay Peng, Kha Tran, Binesh Babu, Ardis Liang, Danilo De Simone, Philippe Leray, Sandip Halder

Proceedings Volume 11611, 1161128 (2021) https://doi.org/10.1117/12.2584760

KEYWORDS: Semiconducting wafers, Extreme ultraviolet, Electron beam lithography, Optical inspection, Inspection, Wafer-level optics, Wafer inspection, Stochastic processes, Optics manufacturing, Lithography

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