Mr. Juan-Manuel Gomez Profile

Juan-Manuel Gomez

at IBM Research - Albany

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

Controlling patterning uniformity in thick resist lithography

Christopher Bottoms, Alexander Hamer, Alejandro Mejia, Alex Hubbard, Nicholas Latham, Katherine Sieg, Jennifer Fullam, Vinay Pai, Junwon Han, Juan-Manuel Gomez, Christopher Waskiewicz, Shahid Butt

Proceedings Volume PC12956, PC129560E (2024) https://doi.org/10.1117/12.3012541

KEYWORDS: Optical lithography, Lithography, Coating thickness, Semiconducting wafers, Plating, Photoresist processing, Dielectrics, Coating

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