Mr. Jose A. Cunado Profile

Jose A. Cunado

at CREOL The College of Optics and Photonics

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Author

Publications (2)

Proceedings Article | 22 March 2007 Paper

High repetition rate LPP source facility for EUVL

T. Schmid, S. George, J. Cunado, S. Teerawattanasook, R. Bernath, C. Brown, K. Takenoshita, C.-S. Koay, M. Richardson

Proceedings Volume 6517, 65173I (2007) https://doi.org/10.1117/12.713457

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Calibration, Reflectivity, Extreme ultraviolet lithography, EUV optics, Metrology, Tin, Diagnostics

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Proceedings Article | 21 March 2007 Paper

Characterization of the tin-doped droplet laser plasma EUVL sources for HVM

Kazutoshi Takenoshita, Simi George, Tobias Schmid, Chiew-Seng Koay, Jose Cunado, Robert Bernath, Christopher Brown, Moza Al-Rabban, William Silfvast, Martin Richardson

Proceedings Volume 6517, 65173O (2007) https://doi.org/10.1117/12.713461

KEYWORDS: Extreme ultraviolet, Plasma, Ions, Mirrors, Tin, Extreme ultraviolet lithography, Diagnostics, Reflectivity, Pulsed laser operation, Gas lasers

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