Dr. John C. Robinson
Senior Principal Scientist
SPIE Involvement:
Conference Program Committee | Symposium Chair | Author | Editor
Area of Expertise:
Metrology , Process Control , Physics , Inspection , Semiconductor Manufacturing , meta optics
Publications (49)

Proceedings Article | 12 March 2024 Presentation + Paper
Proceedings Volume 12913, 129130T (2024) https://doi.org/10.1117/12.2691004
KEYWORDS: Waveguides, Modulation transfer functions, Process control, Augmented reality, Inspection, Metrology

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11611, 1161105 (2021) https://doi.org/10.1117/12.2592866

Proceedings Article | 22 February 2021 Presentation + Paper
Oreste Donzella, John Robinson, Kara Sherman, Justin Lach, Mike von den Hoff, Barry Saville, Thomas Groos, Alex Lim, David Price, Jay Rathert, Chet Lenox
Proceedings Volume 11611, 1161107 (2021) https://doi.org/10.1117/12.2584770
KEYWORDS: Semiconducting wafers, Reliability, Inspection, Process control, Semiconductors, Manufacturing, Packaging, Machine learning, Silicon carbide, High volume manufacturing

Proceedings Article | 20 March 2020 Paper
John Robinson, Kara Sherman, David Price, Jay Rathert
Proceedings Volume 11325, 113250D (2020) https://doi.org/10.1117/12.2551539
KEYWORDS: Reliability, Inspection, Semiconducting wafers, Semiconductors, Defect inspection

Proceedings Article | 26 March 2019 Paper
Honggoo Lee, Sangjun Han, Minhyung Hong, Jieun Lee, Dongyoung Lee, Ahlin Choi, Chanha Park, Dohwa Lee, Seongjae Lee, Jungtae Lee, Jeongpyo Lee, DongSub Choi, Sanghuck Jeon, Zephyr Liu, Hao Mei, Tal Marciano, Eitan Hajaj, Lilach Saltoun, Dana Klein, Eran Amit, Anna Golotsvan, Wayne Zhou, Eitan Herzel, Roie Volkovich, John Robinson
Proceedings Volume 10959, 109591E (2019) https://doi.org/10.1117/12.2515015
KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Scatterometry, Wafer-level optics, Manufacturing, Quality measurement, Imaging systems, Scanning electron microscopy, Diffractive optical elements

Showing 5 of 49 publications
Proceedings Volume Editor (4)

Conference Committee Involvement (16)
Metrology, Inspection, and Process Control XXXIX
23 February 2025 | San Jose, California, United States
Metrology, Inspection, and Process Control XXXVIII
26 February 2024 | San Jose, California, United States
SPIE Advanced Lithography + Patterning
25 February 2024 | San Jose, United States
Metrology, Inspection, and Process Control XXXVII
27 February 2023 | San Jose, California, United States
Metrology, Inspection, and Process Control XXXVI
25 April 2022 | San Jose, California, United States
Showing 5 of 16 Conference Committees
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