In this work, two split U-shaped metamaterials with photoconductive silicon layer are presented and numerically investigated. The electromagnetically induced transparency can be manipulated by changing angles of the incident wave and the conductivity of silicon. At oblique incidence of 50°, the metamaterials exhibit an obvious photoswitching effect. The transmittance peaks of both two structures are as high as about 0.7, respectively. The fishscale metamaterials with integrated silicon layer show a very high modulation depth. Based on the modulation of the conductivity of the silicon, the scheme can be readily applied to realize THz metamaterial switch.
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