Dr. Jigang Ma Profile

Dr. Jigang Ma

SPIE Involvement:

Author

Profile Summary

Jigang Ma received Ph.D. degree in microelectronics in 2015. He had research experience in sub 10nm logic and emerging memory device characterization, variability and modeling.
He is currently a design Engineer to improve on-product performance, in ASML, Netherlands. His current research interests include on-product performance, process integration and patterning for future device technology node.

Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Qualification of small alignment mark by on-product overlay performance

Jigang Ma, Frans Bijnen, Edo Hulsebos, Lukasz Macht, Sotirios Tsiachris, Jin Dai, Rob van der Meulen, Miao Yu, Paul Böcker, Jung-Hwan Kim, Hyun Kim, Gwang-Gon Kim, Joon-Seuk Lee, Eung-Ryong Oh, Hong-Bok Yeon, Young-Deuk Kim, Seung-Uk Jeong, Sang-Ho Lee, Chan-Ha Park

Proceedings Volume 11613, 116130J (2021) https://doi.org/10.1117/12.2584618

KEYWORDS: Optical alignment, Semiconducting wafers, Overlay metrology, Algorithm development, Semiconductor manufacturing, Scanners, Process control, Device simulation

Read Abstract +

Proceedings Article | 23 March 2020 Presentation + Paper

Holistic alignment approach for on-product overlay improvement on DUV lithography process with combined solutions

Jigang Ma, Miao Yu, Cees Lambregts, Sotirios Tsiachris, Paul Böcker, Jun-Yeob Kim, Won-Kwang Ma, Sang-Jun Han, Chan-Ha Park, Kyong-Seok Kim, Jung-Hwan Kim, Sang-Jun Park, Gwang-Gon Kim

Proceedings Volume 11327, 113270S (2020) https://doi.org/10.1117/12.2552938

KEYWORDS: Optical alignment, Overlay metrology, Semiconducting wafers, Deep ultraviolet, Scanners, Lithography, Sensors, Optimization (mathematics), Feedback control

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years