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Jianlin Li
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Publications (1)
Proceedings Article | 10 December 2024 Paper
Research on optical proximity correction with embedded coordinate convolution module
Yongkang Liu, Wei Zhao, Ruixiang Yan, Kai Ni, Yuandong Gu, Jianlin Li
Proceedings Volume 13423, 1342302 (2024) https://doi.org/10.1117/12.3052204
KEYWORDS: Optical proximity correction, Convolution, Lithography, Photoresist materials, Mathematical modeling, Education and training, Deep learning, Source mask optimization, Semiconducting wafers, Optical lithography
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