At SPring-8 BL28B2, Hoshino et al. developed a CT measurement technique using high-energy x-rays (200keV) to observe internal structures of materials. Combining this with a sample exchange robot, high-def x-ray camera, and SP8-DC computer tech, they automated the process from measurement to image reconstruction. The system captures projection images with a maximum field of view of 48mm x 1.2mm, handling larger specimens by repeated scans and stacking CT images. Measuring a sample with the size of 48mm x 10mm takes about 1.5 hours with the effective pixel size of 3.72um/pixel. Then, transferring the data to SP8-DC is completed within half an hour, and image reconstruction takes approximately 6 hours.
Wolter mirrors fabricated by high-precision Ni electroforming process have been applied as focusing optics for x-ray telescopes. The typical replication accuracy is on the order of 100nm. For higher resolution observations, the figure accuracy is required to be improved. Recently, we have been developing an efficient figure correction method using an Si layer on Wolter mirror. Film thickness of Si can be measured with accuracy of 1nm level by thickness measurement gauge. Si is removed under wet process so that the figure accuracy improves. In this study, we developed a fluid jet polishing system especially for removing Si layer on the inner surface of Wolter mirrors. Surface roughness remained unchanged at 0.3nm in RMS (root mean square) value before and after processing to a depth of 133nm. For demonstration, a sine curve with a length of 10mm and PV (peak to valley) of 160nm was processed on Si on a plane surface, resulting in a processing accuracy of 25nm in PV and 6.7nm in RMS.
High-speed imaging is used to directly visualize various phenomena in material processing such as cutting, electric discharge machining, and laser machining. By using high energy X-rays, phenomena inside materials can be analyzed. In this study, the phenomena of metal drilling were observed using a high-speed imaging system with 100 keV X-rays at SPring-8. Various interesting movies were observed with sub-millisecond order time resolution. In this presentation, we will show the latest results of this research and explain the importance of X-ray high speed imaging in the fields of materials processing.
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