Dr. Heng Yang Profile

Dr. Heng Yang

at Delft Univ of Technology

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Author

Publications (6)

Proceedings Article | 19 November 2001 Paper

Damping caused by the gas flow in the holes of perforated structures

Heng Yang, Minhang Bao, Lukasz Pakula, Patrick French

Proceedings Volume 4593, (2001) https://doi.org/10.1117/12.448862

KEYWORDS: Circuit switching, 3D modeling, Analytical research, Statistical analysis, Microelectromechanical systems, Finite element methods, Electrodes, Solids, Baryon acoustic oscillations, Electrical engineering

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Proceedings Article | 15 October 2001 Paper

Experiments and a new model on damping in rare air

Hao Yin, Minhang Bao, Heng Yang, Shaoqun Shen, Bin Xiong

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444694

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Proceedings Article | 15 October 2001 Paper

Phase detection scheme of vibratory gyroscope by 2D driving operation

Heng Yang, Minhang Bao, Hao Yin, Shaoqun Shen, Bin Xiong

Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444696

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Proceedings Article | 15 August 2000 Paper

Dual beam-mass structure gyroscope micromachined by deep RIE process

Heng Yang, Minhang Bao, Hao Yin, Shaoqun Shen

Proceedings Volume 4176, (2000) https://doi.org/10.1117/12.395642

KEYWORDS: Gyroscopes, Bridges, Electrodes, Sensors, Anisotropic etching, Deep reactive ion etching, Etching, Reactive ion etching, Atmospheric sensing, Semiconducting wafers

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Proceedings Article | 31 August 1998 Paper

Composite cantilever beam-mass structure gyroscope by a novel etching technology

Xinxin Li, Minhang Bao, Heng Yang, Shaoqun Shen, Weiyuan Wang

Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324321

KEYWORDS: Etching, Composites, Gyroscopes, Semiconducting wafers, Bridges, Anisotropic etching, Sensors, Photomasks, Resistors, Atmospheric sensing

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Showing 5 of 6 publications

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