Dr. Hao Jiang Profile

Dr. Hao Jiang

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Publications (1)

Proceedings Article | 20 March 2019 Paper

Modeling of dynamic image performance for lithographic projection lens

Zhiyong Yang, Yating Shi, Hao Jiang, Shiyuan Liu

Proceedings Volume 10961, 109610V (2019) https://doi.org/10.1117/12.2515342

KEYWORDS: Lithography, Image quality, Semiconducting wafers, Nanoimprint lithography, Image processing, Artificial intelligence, Process modeling, Performance modeling, Optical components, Reticles

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