CONFERENCE PROCEEDINGS
Advanced Search
Graham McKinnon
President at Norcada Inc
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 9 March 2013 Paper
Fabrication of thin vertical mirrors through plasma etch and KOH:IPA polishing for integration into MEMS electrostatic actuators
M. Huda, T. M. Amin, Y. Ning, G. McKinnon, J. Tulip, W. Jäger
Proceedings Volume 8612, 86120D (2013) https://doi.org/10.1117/12.2005119
KEYWORDS: Etching, Mirrors, Deep reactive ion etching, Actuators, Microelectromechanical systems, Polishing, Silicon, Plasma etching, Semiconducting wafers, Surface finishing
Proceedings Article | 17 October 2012 Paper
A virtual pivot point MEMS rotary comb actuator for tunable laser applications
T. M. Amin, M. Huda, Y. Ning, G. McKinnon, J. Tulip, W. Jäger
Proceedings Volume 8490, 84900D (2012) https://doi.org/10.1117/12.930028
KEYWORDS: Actuators, Oxides, Mirrors, Tunable lasers, Microelectromechanical systems, Silicon, Semiconducting wafers, Deep reactive ion etching, Etching, Optical alignment
SPIE Journal Paper | 20 June 2012
Rotary microelectromechanical system comb-drive actuator with smooth sidewall for photonic applications
Mohammad Quamrul Huda, Talukder Mohammad Amin, Wolfgang Jaeger, Yuebin Ning, Graham McKinnon, John Tulip
JM3, Vol. 11, Issue 02, 023012, (June 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.023012
KEYWORDS: Actuators, Deep reactive ion etching, Etching, Microelectromechanical systems, Oxides, Silicon, Scanning electron microscopy, Gold, Sputter deposition, Atomic force microscopy
Proceedings Article | 7 February 2012 Paper
Rotary MEMS comb-drive actuator with large deflection for photonic applications
M. Q. Huda, T. M. F. Amin, Y. Ning, G. McKinnon, J. Tulip, W. Jäger
Proceedings Volume 8248, 824804 (2012) https://doi.org/10.1117/12.909647
KEYWORDS: Etching, Deep reactive ion etching, Actuators, Oxides, Microelectromechanical systems, Reactive ion etching, Scanning electron microscopy, Polymers, Silicon, Semiconducting wafers
Proceedings Volume Editor (1)
Conference Committee Involvement (2)
Material Processing and Optical Machining
29 September 2004 | Ottawa, Ontario, Canada
Material Processing, Optical Machining, and Nanotechnologies
9 May 2002 | Ottawa, Ontario, Canada
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top