Ms. Ganlin Song Profile

Ganlin Song

at Beijing Superstring Academy of Memory Technology

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 December 2024 Paper

Hao Yang, Di Liang, Yuxing Zhou, Jiahao Xi, Enqiang Tian, Ganlin Song, Mingyi Yao, Jiangliu Shi, Miao Jiang

Proceedings Volume 13423, 134230N (2024) https://doi.org/10.1117/12.3052904

KEYWORDS: Overlay metrology, Semiconducting wafers, Photomasks, Modeling, Failure analysis

Proceedings Article | 10 December 2024 Paper

Di Liang, Hao Yang, Yufei Sha, Yuxing Zhou, Jiahao Xi, Enqiang Tian, Cuixiang Wang, Ganlin Song, Xiaohong Zhao, Jiangliu Shi, Miao Jiang

Proceedings Volume 13423, 134230M (2024) https://doi.org/10.1117/12.3052903

KEYWORDS: Line edge roughness, Semiconducting wafers, Critical dimension metrology, Scanning electron microscopy, Lithography

Proceedings Article | 10 December 2024 Paper

Yuxing Zhou, Guangying Zhou, Mingyi Yao, Di Liang, Jiahao Xi, Ganlin Song, Xiuyan Cheng, Miao Jiang, Jiangliu Shi

Proceedings Volume 13423, 134230K (2024) https://doi.org/10.1117/12.3052900

KEYWORDS: Reticles, Semiconducting wafers, Overlay metrology, Lithography, Scanners

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