Mr. Florent Michel Profile

Florent Michel

at CEA-LETI

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Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper

Die-level nano-topography metrology to characterize the stress-induced in-plane distortion contribution to overlay

Viorel Balan, Florent Michel, Ivanie Mendes, Celine Lapeyre, Lionel Vignoud, Ronald Otten, Orion Mouraille, Leon van Dijk, Blandine Minghetti, Jerome Depre, Richard van Haren

Proceedings Volume 12496, 1249633 (2023) https://doi.org/10.1117/12.2658296

KEYWORDS: Annealing, Semiconducting wafers, Metrology, Distortion, Overlay metrology, Deformation, Chemical mechanical planarization, Silicon, Optical interferometry, Manufacturing

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