Dr. Enrico Lemma
at Karlsruher Institut fuer Technologie
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 March 2020 Presentation
Proceedings Volume 11271, 1127110 (2020) https://doi.org/10.1117/12.2543477
KEYWORDS: Lithography, Manufacturing, Dynamical systems, 3D microstructuring, Chemistry, Molecules, Atomic force microscopy, Laser scanners, Microscopy, Photoresist materials

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