Dr. Emmanuelle Laurenceau Profile

Dr. Emmanuelle Laurenceau

at Ecole Centrale de Lyon

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Publications (1)

Proceedings Article | 20 March 2018 Presentation + Paper

Sub-micron lines patterning into silica using water developable chitosan bioresist films for eco-friendly positive tone e-beam and UV lithography

Mathieu Caillau, Céline Chevalier, Pierre Crémillieu, Thierry Delair, Olivier Soppera, Benjamin Leuschel, Cédric Ray, Christophe Moulin, Christian Jonin, Emmanuel Benichou, Pierre-François Brevet, Christelle Yeromonahos, Emmanuelle Laurenceau, Yann Chevolot, Jean-Louis Leclercq

Proceedings Volume 10587, 105870S (2018) https://doi.org/10.1117/12.2292312

KEYWORDS: Biopolymers, Electron beam lithography, Lithography, Optical lithography, Silicon, Silica, Etching, Absorbance, Polymers, Ultraviolet radiation, Polymethylmethacrylate

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