Dr. Eitan Shalom Profile

Dr. Eitan Shalom

Lithography Group Leader at Tower Semiconductor Ltd

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Publications (4)

Proceedings Article | 15 April 2008 Paper

60-seconds puddle time: a tradition to overcome in CA resists: process optimization and defect elimination

Eitan Shalom, Shaike Zeid

Proceedings Volume 6923, 69233W (2008) https://doi.org/10.1117/12.772558

KEYWORDS: Semiconducting wafers, Photoresist processing, Standards development, Interfaces, Inspection, Head-mounted displays, Optical proximity correction, Scanning electron microscopy, Semiconductors, Chemically amplified resists

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Proceedings Article | 13 August 1993 Paper

Improved CD control over topography through process and resist modification

Eitan Shalom

Proceedings Volume 1972, (1993) https://doi.org/10.1117/12.151102

KEYWORDS: Photoresist processing, Critical dimension metrology, Reflectivity, Absorption, Scanning electron microscopy, Image processing, Skin, Optical engineering, Diffusion, Lithography

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Proceedings Article | 1 June 1990 Paper

Sidewall profile control through processing and dye additives

Eitan Shalom, Donald Johnson, Kelly Hale, Terry Pebbles, William Curtis

Proceedings Volume 1262, (1990) https://doi.org/10.1117/12.20115

KEYWORDS: Photoresist developing, Absorption, Photoresist materials, Image processing, Picture Archiving and Communication System, Reflectivity, Process control, Dysprosium, Cadmium, Remote sensing

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Proceedings Article | 1 June 1990 Paper

EL2015: development of a submicron photoresist for G-, H-, and I-line exposure tools

Donald Johnson, Eitan Shalom, Glenn Dickey, Kelly Hale, Terry Pebbles

Proceedings Volume 1262, (1990) https://doi.org/10.1117/12.20125

KEYWORDS: Photoresist materials, Picture Archiving and Communication System, Absorption, Photoresist developing, Etching, Plasma etching, Resistance, Plasma, Polymers, Optical imaging

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