Mr. Douglas Patriarche Profile

Douglas Patriarche

Co-founder at AI Analysis Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 26 May 2022 Presentation + Paper

Simulating process subtleties in SEM imaging

Benjamin Bunday, Shari Klotzkin, Douglas Patriarche, Maseeh Mukhtar, Kotaro Maruyama, Seul-Ki Kang, Yuichiro Yamazaki

Proceedings Volume 12053, 120530A (2022) https://doi.org/10.1117/12.2615753

KEYWORDS: Scanning electron microscopy, Monte Carlo methods, Visualization, Metrology, Photoresist materials, Chemical mechanical planarization, Silicon, Optical simulations, Signal to noise ratio

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years