Dr. Dilla Duryha Berhanuddin
at Institute of Microengineering and Nanoelectronics
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 30 September 2021
JNP, Vol. 15, Issue 03, 036013, (September 2021) https://doi.org/10.1117/12.10.1117/1.JNP.15.036013
KEYWORDS: Waveguides, Optical microcavities, Silicon, Silica, Cladding, Transmittance, Mirrors, Etching, Light scattering, Fluorine

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