In order to improve on-product-overlay, the image placement performance of a photomask can be corrected and improved through a multiphoton absorption process. This is possible with an ultra-short pulse laser focused into the glass substrate of the mask, from its backside. For optical masks, this is a well-established technology by using the RegC system from ZEISS. Applying this technology to EUV mask requires a backside transparent coating, still electrically conductive for chucking (according to SEMI SPEC). Using nanometers thick Cr and Ni, their oxide and nitride forms, in different stoichiometric forms if need be, we have developed a backside coating with the required optical transmission, sheet conductance, and mechanical durability, and demonstrated femtosecond correction through it. The proposed backside transparent coating designs can be extended to other metals, such as Ti, Ta, Mo and compounds, such as carbides and borides.
We present a novel application of optical tunneling in the context of high-angular resolution, high-contrast techniques with the aim of improving direct imaging capabilities of faint companions in the vicinity of bright stars. In contrast to existing techniques like coronagraphy, we apply well-established techniques from integrated optics to exclusively extinct a very narrow angular direction coming from the sky. This extinction is achieved in the pupil plane and does not suffer from diffraction pattern residuals. We give a comprehensive presentation of the underlying theory as well as first laboratory results.
Ultrathin materials and nano-structuring are becoming essential for the functionalization of optical surfaces. In the talk we will show how ultrathin metals can be exploited to create competitive transparent electrodes. At the same time they can be used to create nanostructured surfaces through mass scalable dewetting and etching techniques. After presenting the techniques, we will focus on the applications made possible by these materials and technologies, including self-cleaning or easy-to-clean display screens, efficient indium-free light emitting diodes and solar cells, antireflective structures for the laser industry and super-wetting surfaces for biology.
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