Dr. Daisy A. Raymondson Profile

Dr. Daisy A. Raymondson

CEO at KMLabs Inc

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Author

Publications (5)

Proceedings Article | 22 February 2021 Presentation

Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography

Fabian Holzmeier, Kevin Dorney, Esben Larsen, Thomas Nuytten, Dhirendra Singh, Michiel van Setten, Pieter Vanelderen, Clayton Bargsten, Seth Cousin, Daisy Raymondson, Eric Rinard, Rod Ward, Henry Kapteyn, Stefan Böttcher, Oleksiy Dyachenko, Raimund Kremzow, Marko Wietstruk, Geoffrey Pourtois, Paul van der Heide, John Petersen

Proceedings Volume 11610, 1161010 (2021) https://doi.org/10.1117/12.2595038

KEYWORDS: Lithography, Extreme ultraviolet lithography, Ultrafast phenomena, Photoemission spectroscopy, Coherence imaging, Semiconducting wafers, Radiometry, Extreme ultraviolet, Time resolved spectroscopy, Spectroscopy

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Proceedings Article | 22 February 2021 Presentation

Lloyd’s mirror interference lithography below a 22-nm pitch with an accessible, tabletop, 13.5 nm high-harmonic EUV source

Kevin Dorney, Sonia Castellanos, Esben Larsen, Fabian Holzmeier, Dhirendra Singh, Nadia Vandenbroeck, Danilo De Simone, Peter De Schepper, Alessandro VaglioPret, Clayton Bargsten, Seth Cousin, Daisy Raymondson, Eric Rinard, Rod Ward, Henry Kaptyen, Thomas Nuytten, Paul Van der Heide, John Petersen

Proceedings Volume 11610, 1161011 (2021) https://doi.org/10.1117/12.2595048

KEYWORDS: Lithography, Extreme ultraviolet, Mirrors, Extreme ultraviolet lithography, Ultrafast phenomena, Photoresist materials, Yield improvement, Semiconductor manufacturing, Semiconducting wafers, Scanning electron microscopy

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Proceedings Article | 23 March 2009 Paper

Tabletop coherent diffractive microscopy with extreme ultraviolet light from high harmonic generation

Daisy Raymondson, Richard Sandberg, William Schlotter, Kevin Raines, Chan La-o-Vorakiat, Ethan Townsend, Anne Sakdinawat, Ariel Paul, Jianwei Miao, Margaret Murnane, Henry Kapteyn

Proceedings Volume 7272, 72720F (2009) https://doi.org/10.1117/12.814313

KEYWORDS: Extreme ultraviolet, High harmonic generation, Coherence imaging, Image resolution, Image retrieval, Phase retrieval, Diffraction, Holography, 3D image reconstruction, Microscopy

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Proceedings Article | 17 March 2005 Paper

Ultrashort-pulse EUV and soft x-ray sources based on high-harmonic generation: principles and applications

Ra'anan Tobey, Daisy Raymondson, Emily Gibson, Chi-Fong Lei, Ariel Paul, Sterling Backus, Mark Siemens, Xiaoshi Zhang, Margaret Murnane, Henry Kapteyn

Proceedings Volume 5580, (2005) https://doi.org/10.1117/12.579521

KEYWORDS: Extreme ultraviolet, Imaging spectroscopy, Waveguides, Oxygen, Acoustics, Signal processing, Modulation, High harmonic generation, Frequency conversion, Ionization

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Proceedings Article | 10 November 2004 Paper

High-resolution imaging system using a tabletop extreme ultraviolet source

Xiaoshi Zhang, Daisy Raymondson, Arvinder Sandhu, Sterling Backus, Yanwei Liu, David Attwood, Margaret Murnane, Henry Kapteyn, Ariel Libertun

Proceedings Volume 5534, (2004) https://doi.org/10.1117/12.557379

KEYWORDS: Extreme ultraviolet, Mirrors, Waveguides, Plasmas, Imaging systems, Image resolution, Microscopes, Microscopy, Light sources, High harmonic generation

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